GERMANIUM EXTREMELY HEAVILY DOPED BY ION-IMPLANTATION AND LASER ANNEALING: A PHOTOLUMINESCENCE STUDY.

J. Wagner, G. Contreras, A. Compaan, M. Cardona, A. Axmann

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6 Citas (Scopus)

Resumen

It has been shown previously that dopant concentrations far above the equilibrium solubility limit can be obtained in semiconductors by pulsed laser annealing of heavily ion implanted material. This fact is exploited to study the photoluminescence of germanium with dopant concentrations up to 10**2**1 cm** minus **3. From this study information is obtained on the filling of higher lying band minima and the shift of the optical band gap as a function of carrier concentration over a much wider range than accessible with bulk doped material. In addition it is shown that photoluminescence provides a diagnostic tool to characterize implanted layers.

Idioma originalInglés
Título de la publicación alojadaMaterials Research Society Symposia Proceedings
EditoresJohn C.C. Fan, Noble M. Johnson
EditorialNorth-Holland
Páginas147-152
Número de páginas6
ISBN (versión impresa)0444009035
EstadoPublicada - 1984
Publicado de forma externa

Serie de la publicación

NombreMaterials Research Society Symposia Proceedings
Volumen23
ISSN (versión impresa)0272-9172

Huella

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