@inproceedings{2d9e3c9cd23f4611be82d14a4b38428a,
title = "Fabrication of planar microelectrodes based on bulk silicon micromachining",
abstract = "The design, fabrication, and basic characterization of planar microelectrodes are reported in this work. Microelectrodes were fabricated using Microelectronics techniques and silicon bulk micromachining. A matrix-like arrangement with 22 electrodes was developed for the purpose of culture cell planned for samples from vagina and urinary organs. Planar electrodes were defined with 40x40 squared-microns area using 200 nanometers-thick of titanium films. The electrode arrangement was distributed in a chip measuring 4x4 millimeters-area. In the central zone of the chip, a two level cavity was bulk-micromachined were the cells/electrodes are to be confined. The complete electrode arrangement was covered using a thin silicon nitride film.",
author = "C. Mata and M. Escobar and C. Z{\'u}{\~n}iga and J. Hidalga and M. Linares and P. Rosales and A. Torres and C. Reyes and J. Molina and {De Rivera}, {L. Ni{\~n}o} and E. Paredes and Raya-Rivera, {A. M.} and I. Ju{\'a}rez and N. Carlos and P. Alarc{\'o}n and L. Hern{\'a}ndez and W. Calleja",
year = "2013",
doi = "10.1007/978-3-642-21198-0_236",
language = "Ingl{\'e}s",
isbn = "9783642211973",
series = "IFMBE Proceedings",
pages = "927--930",
booktitle = "V Latin American Congress on Biomedical Engineering, CLAIB 2011",
note = "5th Latin American Congress on Biomedical Engineering, CLAIB 2011 ; Conference date: 16-05-2011 Through 21-05-2011",
}