TY - JOUR
T1 - Erosion and degradation of EUV lithography collector mirrors under particle bombardment
AU - Allain, Jean P.
AU - Hassanein, Ahmed
AU - Nieto, Martin
AU - Titov, Vladimir
AU - Plotkin, Perry
AU - Hinson, Edward
AU - Rice, Bryan J.
AU - Bristol, R.
AU - Rokusek, Daniel
AU - Lytle, Wayne
AU - Heuser, Brent J.
AU - Allain, Monica M.C.
AU - Ju, Hyunsu
AU - Chrobak, Christopher
PY - 2005
Y1 - 2005
N2 - In extreme ultraviolet lithography (EUVL) environments both laser produced plasma (LPP) and gas discharge produced plasma (GDPP) configurations face serious issues regarding components lifetime and performance under particle bombardment, in particular collector mirrors. For both configurations debris, fast ions, fast neutrals, and condensable EUV radiator fuels (Li, Sn) can affect collector mirrors. In addition, collector mirrors are exposed to impurities (H,C,O,N), off-band radiation (depositing heat) and highly-charged ions leading to their degradation and consequently limiting 13.5 nm light reflection intensity. The IMPACT (Interaction of Materials with charged Particles and Components Testing) experiment at Argonne studies radiation-induced, thermodynamic and kinetic mechanisms that affect the performance of optical mirror surfaces. Results of optical component interaction with singly-charged inert gases (Xe) and alternate radiators (e.g. Sn) are presented for glancing incidence mirrors (i.e., Ru, Pd) at bombarding energies between 100-1000 eV at room temperature. Measurements conducted include: In-situ surface analysis: Auger electron spectroscopy, X-ray photoelectron spectroscopy, direct recoil spectroscopy and low-energy ion scattering spectroscopy; Ex-situ surface analysis: X-ray reflectivity, X-ray diffraction, atomic force microscopy and at-wavelength EUV reflectivity (NIST-SURF).
AB - In extreme ultraviolet lithography (EUVL) environments both laser produced plasma (LPP) and gas discharge produced plasma (GDPP) configurations face serious issues regarding components lifetime and performance under particle bombardment, in particular collector mirrors. For both configurations debris, fast ions, fast neutrals, and condensable EUV radiator fuels (Li, Sn) can affect collector mirrors. In addition, collector mirrors are exposed to impurities (H,C,O,N), off-band radiation (depositing heat) and highly-charged ions leading to their degradation and consequently limiting 13.5 nm light reflection intensity. The IMPACT (Interaction of Materials with charged Particles and Components Testing) experiment at Argonne studies radiation-induced, thermodynamic and kinetic mechanisms that affect the performance of optical mirror surfaces. Results of optical component interaction with singly-charged inert gases (Xe) and alternate radiators (e.g. Sn) are presented for glancing incidence mirrors (i.e., Ru, Pd) at bombarding energies between 100-1000 eV at room temperature. Measurements conducted include: In-situ surface analysis: Auger electron spectroscopy, X-ray photoelectron spectroscopy, direct recoil spectroscopy and low-energy ion scattering spectroscopy; Ex-situ surface analysis: X-ray reflectivity, X-ray diffraction, atomic force microscopy and at-wavelength EUV reflectivity (NIST-SURF).
KW - EUV collector optics
KW - EUV reflectivity
KW - Ion scattering spectroscopy
KW - Multilayer erosion
KW - Sputtering
UR - http://www.scopus.com/inward/record.url?scp=24644512196&partnerID=8YFLogxK
U2 - 10.1117/12.598515
DO - 10.1117/12.598515
M3 - Artículo de la conferencia
AN - SCOPUS:24644512196
SN - 1605-7422
VL - 5751
SP - 1110
EP - 1117
JO - Progress in Biomedical Optics and Imaging - Proceedings of SPIE
JF - Progress in Biomedical Optics and Imaging - Proceedings of SPIE
IS - II
M1 - 136
T2 - Emerging Lithographic Technologies IX
Y2 - 1 March 2005 through 3 March 2005
ER -