Effects of magnetic field configuration on RF sputtering for CdS/CdTe solar cells

A. Compaan; M. Shao; A. Fischer; D. Grecu; U. Jayamaha; G. Contreras-Puente; R. G. Bohn

doi:10.1557/proc-426-391

Effects of magnetic field configuration on RF sputtering for CdS/CdTe solar cells

A. Compaan, M. Shao, A. Fischer, D. Grecu, U. Jayamaha, G. Contreras-Puente, R. G. Bohn

Producción científica: Contribución a una revista › Artículo de la conferencia › revisión exhaustiva

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Resumen

We report studies of solar cells prepared by rf planar magnetron sputtering in which the films were deposited using magnetic field structures ranging from approximately balanced to strongly unbalanced in the `type II' configuration. For films grown with the unbalanced configurations, we find much stronger photoluminescence and much better cell performance than for the balanced configuration. The CdTe films show differences in electrical performance depending on magnetic field as well. These effects are interpreted as arising from the enhanced electron and ion bombardment of the film growth interface for the unbalanced magnetrons. Using two unbalanced magnetrons we have fabricated an all-rf-sputtered cell with NREL-verified efficiency of 11.6% at air mass 1.5 illumination.

Idioma original	Inglés
Páginas (desde-hasta)	391-396
Número de páginas	6
Publicación	Materials Research Society Symposium - Proceedings
Volumen	426
DOI	https://doi.org/10.1557/proc-426-391
Estado	Publicada - 1996
Publicado de forma externa	Sí
Evento	Proceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA Duración: 8 abr. 1996 → 11 abr. 1996

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title = "Effects of magnetic field configuration on RF sputtering for CdS/CdTe solar cells",

abstract = "We report studies of solar cells prepared by rf planar magnetron sputtering in which the films were deposited using magnetic field structures ranging from approximately balanced to strongly unbalanced in the `type II' configuration. For films grown with the unbalanced configurations, we find much stronger photoluminescence and much better cell performance than for the balanced configuration. The CdTe films show differences in electrical performance depending on magnetic field as well. These effects are interpreted as arising from the enhanced electron and ion bombardment of the film growth interface for the unbalanced magnetrons. Using two unbalanced magnetrons we have fabricated an all-rf-sputtered cell with NREL-verified efficiency of 11.6% at air mass 1.5 illumination.",

author = "A. Compaan and M. Shao and A. Fischer and D. Grecu and U. Jayamaha and G. Contreras-Puente and Bohn, {R. G.}",

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T1 - Effects of magnetic field configuration on RF sputtering for CdS/CdTe solar cells

AU - Compaan, A.

AU - Shao, M.

AU - Fischer, A.

AU - Grecu, D.

AU - Jayamaha, U.

AU - Contreras-Puente, G.

AU - Bohn, R. G.

PY - 1996

Y1 - 1996

N2 - We report studies of solar cells prepared by rf planar magnetron sputtering in which the films were deposited using magnetic field structures ranging from approximately balanced to strongly unbalanced in the `type II' configuration. For films grown with the unbalanced configurations, we find much stronger photoluminescence and much better cell performance than for the balanced configuration. The CdTe films show differences in electrical performance depending on magnetic field as well. These effects are interpreted as arising from the enhanced electron and ion bombardment of the film growth interface for the unbalanced magnetrons. Using two unbalanced magnetrons we have fabricated an all-rf-sputtered cell with NREL-verified efficiency of 11.6% at air mass 1.5 illumination.

AB - We report studies of solar cells prepared by rf planar magnetron sputtering in which the films were deposited using magnetic field structures ranging from approximately balanced to strongly unbalanced in the `type II' configuration. For films grown with the unbalanced configurations, we find much stronger photoluminescence and much better cell performance than for the balanced configuration. The CdTe films show differences in electrical performance depending on magnetic field as well. These effects are interpreted as arising from the enhanced electron and ion bombardment of the film growth interface for the unbalanced magnetrons. Using two unbalanced magnetrons we have fabricated an all-rf-sputtered cell with NREL-verified efficiency of 11.6% at air mass 1.5 illumination.

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M3 - Artículo de la conferencia

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EP - 396

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1996 MRS Spring Symposium

Y2 - 8 April 1996 through 11 April 1996

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Effects of magnetic field configuration on RF sputtering for CdS/CdTe solar cells

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