TY - GEN
T1 - Effect of hydrolysis modifier on the properties of ATO films prepared by spin coating
AU - Galaviz-Pérez, J. A.
AU - Chen, Fei
AU - Shen, Qiang
AU - Vargas García, J. R.
AU - Zhang, Lianmeng
PY - 2013
Y1 - 2013
N2 - ATO thin films have been successfully prepared by the spin coating method using an ethanol solution of SnCl4·5H2O and SbCl3 using acetylacetone as hydrolysis modifier. ATO films from 1 to 6 layers were prepared at 300 °C as densification temperature and within an annealing temperature ranging from 450 °C to 750 °C. Films exhibited the cassiterite crystalline phase and morphology consisted in nanoparticles of about 10 nm in diameter. Acetylacetone content as well the addition of water affected the particle size and morphology, decreasing particle size and the appearance of voids. Films prepared at an acetylacetone ratio of 4 with no addition of water exhibited an optical transparency above 90% from 380 to 800 nm while resistivity was 7.99 ×10-3 Ω·cm. The effect of the hydrolysis modifier on the electric properties, morphology, optical transparency and microstructure has been studied.
AB - ATO thin films have been successfully prepared by the spin coating method using an ethanol solution of SnCl4·5H2O and SbCl3 using acetylacetone as hydrolysis modifier. ATO films from 1 to 6 layers were prepared at 300 °C as densification temperature and within an annealing temperature ranging from 450 °C to 750 °C. Films exhibited the cassiterite crystalline phase and morphology consisted in nanoparticles of about 10 nm in diameter. Acetylacetone content as well the addition of water affected the particle size and morphology, decreasing particle size and the appearance of voids. Films prepared at an acetylacetone ratio of 4 with no addition of water exhibited an optical transparency above 90% from 380 to 800 nm while resistivity was 7.99 ×10-3 Ω·cm. The effect of the hydrolysis modifier on the electric properties, morphology, optical transparency and microstructure has been studied.
KW - ATO films
KW - Acetylacetone
KW - Optical transmittance
KW - Spin coating
UR - http://www.scopus.com/inward/record.url?scp=84873666496&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.537.155
DO - 10.4028/www.scientific.net/KEM.537.155
M3 - Contribución a la conferencia
SN - 9783037855669
T3 - Key Engineering Materials
SP - 155
EP - 160
BT - Inorganic Thin Films and Coatings
PB - Trans Tech Publications Ltd
T2 - 2012 Workshop on Inorganic Thin Films and Coatings
Y2 - 16 July 2012 through 18 July 2012
ER -