Resumen
The Raman phonon frequency of Si heavily doped with P, As, and Sb by means of ion implantation and laser annealing (IILA) has been measured. This frequency decreases with increasing doping. The experimental results are interpreted in terms of the calculated self energy for phonons interacting with free electrons.
Idioma original | Inglés |
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Páginas (desde-hasta) | 303-305 |
Número de páginas | 3 |
Publicación | Solid State Communications |
Volumen | 49 |
N.º | 4 |
DOI | |
Estado | Publicada - ene. 1984 |
Publicado de forma externa | Sí |