Design and simulation of mass sensors based on horizontally actuated silicon cantilevers

Física y astronomía

• settling 76%
• sensors 59%
• silicon 52%
• signal detection 38%
• simulation 37%
• parallel plates 33%
• readout 29%
• CMOS 29%
• resonant frequencies 28%
• capacitors 28%
• actuators 26%
• nonlinearity 24%
• oscillations 20%
• electrodes 20%
• shift 19%
• electronics 16%

Química

• Capacitor 100%
• Displacement 79%
• Plate Like Crystal 76%
• Simulation 61%
• Behavior as Electrode 48%
• Time 35%

Ingeniería y ciencia de los materiales

• Silicon 76%
• Sensors 50%
• Polysilicon 37%
• Signal detection 36%
• SPICE 35%
• Electronic equipment 27%
• Natural frequencies 27%
• Capacitors 25%
• Electrodes 24%
• Actuators 24%
• Finite element method 20%