TY - JOUR
T1 - Characterization of Al0.047Ga0.953Sb layers grown on GaSb using reciprocal space maps
AU - López-Salazar, Primavera
AU - Martínez-Juárez, Javier
AU - Juárez-Díaz, Gabriel
AU - De Anda-Salazar, Francisco
AU - Peña-Sierra, Ramon
AU - García Borquez, Arturo
AU - Hernández-De La Luz, Alvaro David
N1 - Publisher Copyright:
© 2015 Elsevier B.V. All rights reserved.
PY - 2016/3/1
Y1 - 2016/3/1
N2 - Structures of Al0.047Ga0.953Sb layers on GaSb (100) substrates were studied by high resolution X-ray diffraction (HRXRD) using reciprocal space maps (RSM) and rocking curves around the (004) and (115) reflections. The layers were grown at 450 °C with a supersaturation of 10 °C in a conventional Liquid Phase Epitaxy (LPE) system varying the growth time from 1 to 4 min resulting in an increment of thickness. It was found that tilt, relaxation and dislocation density of the layers can be calculated using its rocking curves and reciprocal space mapping and it is found that these characteristics are influenced by the thickness of layer.
AB - Structures of Al0.047Ga0.953Sb layers on GaSb (100) substrates were studied by high resolution X-ray diffraction (HRXRD) using reciprocal space maps (RSM) and rocking curves around the (004) and (115) reflections. The layers were grown at 450 °C with a supersaturation of 10 °C in a conventional Liquid Phase Epitaxy (LPE) system varying the growth time from 1 to 4 min resulting in an increment of thickness. It was found that tilt, relaxation and dislocation density of the layers can be calculated using its rocking curves and reciprocal space mapping and it is found that these characteristics are influenced by the thickness of layer.
KW - Epitaxial growth
KW - GaSb based alloys
KW - III-V compounds
KW - Lattice relaxation
KW - Layer tilt
KW - Reciprocal space mapping
UR - http://www.scopus.com/inward/record.url?scp=84952815236&partnerID=8YFLogxK
U2 - 10.1016/j.matlet.2015.12.084
DO - 10.1016/j.matlet.2015.12.084
M3 - Artículo
SN - 0167-577X
VL - 166
SP - 239
EP - 242
JO - Materials Letters
JF - Materials Letters
ER -