TY - GEN
T1 - Basic readout circuit applied on FGMOS-based CMOS-MEMS inertial sensing prototypes
AU - Granados-Rojas, Benito
AU - Reyes-Barranca, Mario Alfredo
AU - Flores-Nava, Luis Martin
AU - Abarca-Jimenez, Griselda Stephany
AU - Gonzalez-Navarro, Yesenia Eleonor
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/11/14
Y1 - 2017/11/14
N2 - In this work is reported a brief summary of considerations for the design of a basic readout CMOS integrated system applied for the conditioning of small signals taken from a floating-gate based CMOS-MEMS capacitive structure intended for inertial measurement. Both the electromechanical structure and the readout circuit (consisting in a variable capacitor coupled to the gate of a MOSFET and a conventional CMOS amplification stage, respectively) were designed for and fabricated in the 0.5um standard CMOS MPW platform available in ON Semi. Simulation results for every component are presented as well as a comparison with measurements for the second stage of the readout system since the mobile capacitive structure (first stage) needs further post-processing to reach its proper functioning and desired behavior.
AB - In this work is reported a brief summary of considerations for the design of a basic readout CMOS integrated system applied for the conditioning of small signals taken from a floating-gate based CMOS-MEMS capacitive structure intended for inertial measurement. Both the electromechanical structure and the readout circuit (consisting in a variable capacitor coupled to the gate of a MOSFET and a conventional CMOS amplification stage, respectively) were designed for and fabricated in the 0.5um standard CMOS MPW platform available in ON Semi. Simulation results for every component are presented as well as a comparison with measurements for the second stage of the readout system since the mobile capacitive structure (first stage) needs further post-processing to reach its proper functioning and desired behavior.
KW - CMOS-MEMS
KW - FGMOS
KW - MEMS
KW - capacitive MEMS
KW - floating-gate
KW - readout circuit
UR - http://www.scopus.com/inward/record.url?scp=85040590968&partnerID=8YFLogxK
U2 - 10.1109/ICEEE.2017.8108910
DO - 10.1109/ICEEE.2017.8108910
M3 - Contribución a la conferencia
AN - SCOPUS:85040590968
T3 - 2017 14th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2017
BT - 2017 14th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 14th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2017
Y2 - 20 September 2017 through 22 September 2017
ER -