European Patent Office awards patent to TECHNICAL INST OF PHYSICS AND CHEMISTRY OF THE CHINESE ACADEMY OF SCIENCES for "MASKLESS PHOTOLITHOGRAPHIC SYSTEM IN COOPERATIVE WORKING MODE FOR CROSS-SCALE STRUCTURE"

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Período1 ene. 2021

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  • NombreEuropean Patent Office awards patent to TECHNICAL INST OF PHYSICS AND CHEMISTRY OF THE CHINESE ACADEMY OF SCIENCES for "MASKLESS PHOTOLITHOGRAPHIC SYSTEM IN COOPERATIVE WORKING MODE FOR CROSS-SCALE STRUCTURE"
    Nombre/canal del medio de comunicaciónImpact Financial News
    Fecha1/01/21
    PersonasS. H. Dong
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