Visible photoluminescence of Ge enriched SiOx layers

T. V. Torchynska, A. Vivas Hernandez, A. V. Kolobov, Y. Goldstein, E. Savir, J. Jedrzejewski

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

This paper concentrates on results of photoluminescence (PL), Raman scattering and extended X-ray absorption fine structure (EXAFS) investigations of silicon oxide films enriched by Ge. All the spectra were analyzed both for "as prepared" silicon oxide films enriched by Ge (without Ge-quantum dots, QD) and for films after high temperature annealing in inert atmosphere with the aim of creating Ge-nano-crystallites (nc)-quantum dots. Five PL bands were discovered in Ge-SiOx systems. It is shown that the visible PL bands peaked at 1.61-1.65eV (2), 1.75-1.80eV (3), 2.00-2.06eV (4) and 2.25-2.30eV (5) do not correlate with the presence of Ge atoms or Ge-nc in the samples. The nature of the infrared PL band peaked at 1.43-1.52eV is not clear. The intensity of this PL band increases in thermally annealed samples with increasing Ge concentration.

Translated title of the contributionFotoluminiscencia visible de capas de SiO x enriquecidas con Ge
Original languageEnglish
Pages (from-to)619-622
Number of pages4
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume137-140
Issue numberSPEC. ISS.
DOIs
StatePublished - Jul 2004

Keywords

  • Ge-SiO layers
  • Ge-quantum dots
  • Visible photoluminescence

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