TY - JOUR
T1 - Visible and infrared photocatalytic activity of TiOx thin films prepared by reactive sputtering
AU - Zapata-Torres, M.
AU - Hernández-Rodríguez, E.
AU - Mis-Fernandez, R.
AU - Meléndez-Lira, M.
AU - Calzadilla Amaya, O.
AU - Bahena, D.
AU - Rejon, V.
AU - Peña, J. L.
N1 - Publisher Copyright:
© 2015 Elsevier Ltd. All rights reserved.
PY - 2015/8/1
Y1 - 2015/8/1
N2 - TiOx thin films have been deposited on corning glass substrates, using RF magnetron reactive sputtering from a Ti target. The effect of oxygen mass flow (OMF) used during the growth of the films on their physical and photocatalytic properties was investigated. The properties of the samples were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS) and UV-vis spectroscopy. The films presented a stratified structure with the surface layer having the stoichiometric characteristics of TiO2 while the inner layer contained a mixture of TiO2, Ti2O3 and TiO oxides. The photocatalytic efficiency was evaluated by the photodegradation of a methylene blue aqueous solution. The samples showed a photocatalytic activity in the visible and visible-NIR light spectrum, depending on the phases of titanium oxides present in the film.
AB - TiOx thin films have been deposited on corning glass substrates, using RF magnetron reactive sputtering from a Ti target. The effect of oxygen mass flow (OMF) used during the growth of the films on their physical and photocatalytic properties was investigated. The properties of the samples were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS) and UV-vis spectroscopy. The films presented a stratified structure with the surface layer having the stoichiometric characteristics of TiO2 while the inner layer contained a mixture of TiO2, Ti2O3 and TiO oxides. The photocatalytic efficiency was evaluated by the photodegradation of a methylene blue aqueous solution. The samples showed a photocatalytic activity in the visible and visible-NIR light spectrum, depending on the phases of titanium oxides present in the film.
KW - NIR photocathalitic activity
KW - Red-shift band gap
KW - TiO
UR - http://www.scopus.com/inward/record.url?scp=84938302711&partnerID=8YFLogxK
U2 - 10.1016/j.mssp.2015.07.072
DO - 10.1016/j.mssp.2015.07.072
M3 - Artículo
SN - 1369-8001
VL - 40
SP - 720
EP - 726
JO - Materials Science in Semiconductor Processing
JF - Materials Science in Semiconductor Processing
ER -