Variation in the structure and optical properties of polymorphous silicon thin films using dichlorosilane as silicon precursor

Polymorphous silicon thin films were obtained by plasma enhanced chemical vapor deposition using dichlorosilane as silicon precursor. The RF power and the dichlorosilane to hydrogen flow rate ratio were varied to obtain different crystalline fractions and average sizes of silicon nanocrystals embedded in the amorphous silicon matrix. Microscopy images confirmed the existence of nanocrystallites with averages sizes between 2 and 6 nm. Broader size distributions were obtained with increasing RF power. Raman results confirmed that different nanocrystalline fractions (from 12% to 54%) can be achieved in these films by regulating the selected growth parameters. The optical band gap calculated by the Tauc model from UV-visible transmittance measurements varies between 1.8 to 2.3 eV. The relationship between the optical properties is discussed in terms of the different nanostructures of the samples. Depending on their absorption properties and effective band gap, these materials can be suitable for application in thin film solar cell devices.