UV photoreflectance spectroscopy in strained silicon on insulator structures

Jacobo Munguía, Jean Marie Bluet, Houssam Chouaib, Georges Bremond, Catherine Bru-Chevallier

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

The optical modulation technique of photoreflectance (PR) is applied on tensely-strained silicon on insulator (sSOI) sub-strates in order to determine the deformation potential in the strained silicon direct band gap. Raman spectroscopy is used for strain determination. A redshift of the Si direct band gap transition is observed as the strain induced in the layer is increased. We report a band gap shrinkage at Γ-point down to 60 ± 6 meV, 120 ± 15 meV and 127 ± 13 meV for 0.77 ± 0.02%, 1.22 ±0.02% and 1.40 ±0.03% of strain, re-spectively. The obtained deformation potential in the direct band gap (a = -0.55 eV and b = -2.45 eV) are in good agree-ment with previously reported results for bulk material.

Original languageEnglish
Pages (from-to)821-825
Number of pages5
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume206
Issue number5
DOIs
StatePublished - May 2009
Externally publishedYes

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