Thermodynamic study of CVD-ZrO2 phase diagrams

A. M. Torres-Huerta; J. R. Vargas-García; M. A. Domínguez-Crespo; J. A. Romero-Serrano

doi:10.1016/j.jallcom.2008.08.128

Thermodynamic study of CVD-ZrO₂ phase diagrams

A. M. Torres-Huerta, J. R. Vargas-García, M. A. Domínguez-Crespo, J. A. Romero-Serrano

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Chemical vapor deposition (CVD) of zirconium oxide (ZrO₂) from zirconium acetylacetonate Zr(acac)₄ has been thermodynamically investigated using the Gibbs' free energy minimization method and the FACTSAGE program. Thermodynamic data Cp°, ΔH° and S° for Zr(acac)₄ have been estimated using the Meghreblian-Crawford-Parr and Benson methods because they are not available in the literature. The effect of deposition parameters, such as temperature and pressure, on the extension of the region where pure ZrO₂ can be deposited was analyzed. The results are presented as calculated CVD stability diagrams. The phase diagrams showed two zones, one of them corresponds to pure monoclinic phase of ZrO₂ and the other one corresponds to a mix of monoclinic phase of ZrO₂ and graphite carbon.

Original language	English
Pages (from-to)	394-398
Number of pages	5
Journal	Journal of Alloys and Compounds
Volume	483
Issue number	1-2
DOIs	https://doi.org/10.1016/j.jallcom.2008.08.128
State	Published - 26 Aug 2009
Externally published	Yes

Keywords

CVD
Thermodynamics
Zirconia
Zr(acac) reaction

Access to Document

10.1016/j.jallcom.2008.08.128

Cite this

@article{43167676707c4bdfb43bfab1de46b70e,

title = "Thermodynamic study of CVD-ZrO2 phase diagrams",

abstract = "Chemical vapor deposition (CVD) of zirconium oxide (ZrO2) from zirconium acetylacetonate Zr(acac)4 has been thermodynamically investigated using the Gibbs' free energy minimization method and the FACTSAGE program. Thermodynamic data Cp°, ΔH° and S° for Zr(acac)4 have been estimated using the Meghreblian-Crawford-Parr and Benson methods because they are not available in the literature. The effect of deposition parameters, such as temperature and pressure, on the extension of the region where pure ZrO2 can be deposited was analyzed. The results are presented as calculated CVD stability diagrams. The phase diagrams showed two zones, one of them corresponds to pure monoclinic phase of ZrO2 and the other one corresponds to a mix of monoclinic phase of ZrO2 and graphite carbon.",

keywords = "CVD, Thermodynamics, Zirconia, Zr(acac) reaction",

author = "Torres-Huerta, {A. M.} and Vargas-Garc{\'i}a, {J. R.} and Dom{\'i}nguez-Crespo, {M. A.} and Romero-Serrano, {J. A.}",

note = "Funding Information: This study was supported by the National Polytechnic Institute (IPN) of Mexico through the projects SIP-IPN 20072176, 20071120 and SNI-CONACyT.",

year = "2009",

month = aug,

day = "26",

doi = "10.1016/j.jallcom.2008.08.128",

language = "Ingl{\'e}s",

volume = "483",

pages = "394--398",

journal = "Journal of Alloys and Compounds",

issn = "0925-8388",

number = "1-2",

}

TY - JOUR

T1 - Thermodynamic study of CVD-ZrO2 phase diagrams

AU - Torres-Huerta, A. M.

AU - Vargas-García, J. R.

AU - Domínguez-Crespo, M. A.

AU - Romero-Serrano, J. A.

N1 - Funding Information: This study was supported by the National Polytechnic Institute (IPN) of Mexico through the projects SIP-IPN 20072176, 20071120 and SNI-CONACyT.

PY - 2009/8/26

Y1 - 2009/8/26

N2 - Chemical vapor deposition (CVD) of zirconium oxide (ZrO2) from zirconium acetylacetonate Zr(acac)4 has been thermodynamically investigated using the Gibbs' free energy minimization method and the FACTSAGE program. Thermodynamic data Cp°, ΔH° and S° for Zr(acac)4 have been estimated using the Meghreblian-Crawford-Parr and Benson methods because they are not available in the literature. The effect of deposition parameters, such as temperature and pressure, on the extension of the region where pure ZrO2 can be deposited was analyzed. The results are presented as calculated CVD stability diagrams. The phase diagrams showed two zones, one of them corresponds to pure monoclinic phase of ZrO2 and the other one corresponds to a mix of monoclinic phase of ZrO2 and graphite carbon.

AB - Chemical vapor deposition (CVD) of zirconium oxide (ZrO2) from zirconium acetylacetonate Zr(acac)4 has been thermodynamically investigated using the Gibbs' free energy minimization method and the FACTSAGE program. Thermodynamic data Cp°, ΔH° and S° for Zr(acac)4 have been estimated using the Meghreblian-Crawford-Parr and Benson methods because they are not available in the literature. The effect of deposition parameters, such as temperature and pressure, on the extension of the region where pure ZrO2 can be deposited was analyzed. The results are presented as calculated CVD stability diagrams. The phase diagrams showed two zones, one of them corresponds to pure monoclinic phase of ZrO2 and the other one corresponds to a mix of monoclinic phase of ZrO2 and graphite carbon.

KW - CVD

KW - Thermodynamics

KW - Zirconia

KW - Zr(acac) reaction

UR - http://www.scopus.com/inward/record.url?scp=69249234746&partnerID=8YFLogxK

U2 - 10.1016/j.jallcom.2008.08.128

DO - 10.1016/j.jallcom.2008.08.128

M3 - Artículo

SN - 0925-8388

VL - 483

SP - 394

EP - 398

JO - Journal of Alloys and Compounds

JF - Journal of Alloys and Compounds

IS - 1-2

ER -

Thermodynamic study of CVD-ZrO₂ phase diagrams

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this