Study of dilution of Spin-On Glass by Fourier transform infrared spectroscopy

Miguel Dominguez; Pedro Rosales; Alfonso Torres; Mario Moreno; Abdu Orduña

doi:10.1016/j.tsf.2012.03.013

Study of dilution of Spin-On Glass by Fourier transform infrared spectroscopy

Miguel Dominguez, Pedro Rosales, Alfonso Torres, Mario Moreno, Abdu Orduña

Centro de Investigación en Biotecnología Aplicada (CIBA), Unidad Tlaxcala

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

In this work, we study the dilution of Spin-On Glass (SOG) in order to obtain high quality SiO ₂ films at 200 °C, with optical and electrical characteristics similar to those of the thermally grown SiO ₂. For the production of SiO ₂ films we used 2-propanol and deionized water (DI) as diluents for the SOG and we compared the electrical and optical film properties with those of the films obtained from undiluted SOG. From Fourier transform infrared spectroscopy we observed a considerable reduction of SiOH (920 cm ^{- 1}), OH (3490 cm ^{- 1}) and CH, CO bonds (1139 cm ^{- 1}) in the films produced from SOG diluted with DI. Besides the above, the insulator breakdown field was approximately 21 MV/cm, the refractive index and the dielectric constant were close to those of the thermally grown SiO ₂. Our results suggest that the film produced from SOG diluted with DI and cured at 200 °C is an excellent candidate to be used as insulator on flexible and large-area electronics.

Original language	English
Pages (from-to)	5018-5020
Number of pages	3
Journal	Thin Solid Films
Volume	520
Issue number	15
DOIs	https://doi.org/10.1016/j.tsf.2012.03.013
State	Published - 31 May 2012

Keywords

Fourier-transform infrared spectroscopy
Insulator
Low-temperature
Spin-on glass

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10.1016/j.tsf.2012.03.013

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title = "Study of dilution of Spin-On Glass by Fourier transform infrared spectroscopy",

abstract = "In this work, we study the dilution of Spin-On Glass (SOG) in order to obtain high quality SiO 2 films at 200 °C, with optical and electrical characteristics similar to those of the thermally grown SiO 2. For the production of SiO 2 films we used 2-propanol and deionized water (DI) as diluents for the SOG and we compared the electrical and optical film properties with those of the films obtained from undiluted SOG. From Fourier transform infrared spectroscopy we observed a considerable reduction of SiOH (920 cm - 1), OH (3490 cm - 1) and CH, CO bonds (1139 cm - 1) in the films produced from SOG diluted with DI. Besides the above, the insulator breakdown field was approximately 21 MV/cm, the refractive index and the dielectric constant were close to those of the thermally grown SiO 2. Our results suggest that the film produced from SOG diluted with DI and cured at 200 °C is an excellent candidate to be used as insulator on flexible and large-area electronics.",

keywords = "Fourier-transform infrared spectroscopy, Insulator, Low-temperature, Spin-on glass",

author = "Miguel Dominguez and Pedro Rosales and Alfonso Torres and Mario Moreno and Abdu Ordu{\~n}a",

year = "2012",

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day = "31",

doi = "10.1016/j.tsf.2012.03.013",

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TY - JOUR

T1 - Study of dilution of Spin-On Glass by Fourier transform infrared spectroscopy

AU - Dominguez, Miguel

AU - Rosales, Pedro

AU - Torres, Alfonso

AU - Moreno, Mario

AU - Orduña, Abdu

PY - 2012/5/31

Y1 - 2012/5/31

N2 - In this work, we study the dilution of Spin-On Glass (SOG) in order to obtain high quality SiO 2 films at 200 °C, with optical and electrical characteristics similar to those of the thermally grown SiO 2. For the production of SiO 2 films we used 2-propanol and deionized water (DI) as diluents for the SOG and we compared the electrical and optical film properties with those of the films obtained from undiluted SOG. From Fourier transform infrared spectroscopy we observed a considerable reduction of SiOH (920 cm - 1), OH (3490 cm - 1) and CH, CO bonds (1139 cm - 1) in the films produced from SOG diluted with DI. Besides the above, the insulator breakdown field was approximately 21 MV/cm, the refractive index and the dielectric constant were close to those of the thermally grown SiO 2. Our results suggest that the film produced from SOG diluted with DI and cured at 200 °C is an excellent candidate to be used as insulator on flexible and large-area electronics.

AB - In this work, we study the dilution of Spin-On Glass (SOG) in order to obtain high quality SiO 2 films at 200 °C, with optical and electrical characteristics similar to those of the thermally grown SiO 2. For the production of SiO 2 films we used 2-propanol and deionized water (DI) as diluents for the SOG and we compared the electrical and optical film properties with those of the films obtained from undiluted SOG. From Fourier transform infrared spectroscopy we observed a considerable reduction of SiOH (920 cm - 1), OH (3490 cm - 1) and CH, CO bonds (1139 cm - 1) in the films produced from SOG diluted with DI. Besides the above, the insulator breakdown field was approximately 21 MV/cm, the refractive index and the dielectric constant were close to those of the thermally grown SiO 2. Our results suggest that the film produced from SOG diluted with DI and cured at 200 °C is an excellent candidate to be used as insulator on flexible and large-area electronics.

KW - Fourier-transform infrared spectroscopy

KW - Insulator

KW - Low-temperature

KW - Spin-on glass

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U2 - 10.1016/j.tsf.2012.03.013

DO - 10.1016/j.tsf.2012.03.013

M3 - Artículo

SN - 0040-6090

VL - 520

SP - 5018

EP - 5020

JO - Thin Solid Films

JF - Thin Solid Films

IS - 15

ER -

Study of dilution of Spin-On Glass by Fourier transform infrared spectroscopy

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Keywords

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