TY - JOUR
T1 - Structure of PbTe(SiO2)/SiO2 multilayers deposited on Si(111)
AU - Kellermann, Guinther
AU - Rodriguez, Eugenio
AU - Jimenez, Ernesto
AU - Cesar, Carlos Lenz
AU - Barbosa, Luiz Carlos
AU - Craievich, Aldo Felix
PY - 2010
Y1 - 2010
N2 - The structure of thin films composed of a multilayer of PbTe nanocrystals embedded in SiO2, named as PbTe(SiO2), between homogeneous layers of amorphous SiO2 deposited on a single-crystal Si(111) substrate was studied by grazing-incidence small-angle X-ray scattering (GISAXS) as a function of PbTe content. PbTe(SiO2)/SiO2 multilayers were produced by alternately applying plasma-enhanced chemical vapour deposition and pulsed laser deposition techniques. From the analysis of the experimental GISAXS patterns, the average radius and radius dispersion of PbTe nanocrystals were determined. With increasing deposition dose the size of the PbTe nanocrystals progressively increases while their number density decreases. Analysis of the GISAXS intensity profiles along the normal to the sample surface allowed the determination of the period parameter of the layers and a structure parameter that characterizes the disorder in the distances between PbTe layers.
AB - The structure of thin films composed of a multilayer of PbTe nanocrystals embedded in SiO2, named as PbTe(SiO2), between homogeneous layers of amorphous SiO2 deposited on a single-crystal Si(111) substrate was studied by grazing-incidence small-angle X-ray scattering (GISAXS) as a function of PbTe content. PbTe(SiO2)/SiO2 multilayers were produced by alternately applying plasma-enhanced chemical vapour deposition and pulsed laser deposition techniques. From the analysis of the experimental GISAXS patterns, the average radius and radius dispersion of PbTe nanocrystals were determined. With increasing deposition dose the size of the PbTe nanocrystals progressively increases while their number density decreases. Analysis of the GISAXS intensity profiles along the normal to the sample surface allowed the determination of the period parameter of the layers and a structure parameter that characterizes the disorder in the distances between PbTe layers.
UR - http://www.scopus.com/inward/record.url?scp=77952492333&partnerID=8YFLogxK
U2 - 10.1107/S0021889810005625
DO - 10.1107/S0021889810005625
M3 - Artículo
SN - 0021-8898
VL - 43
SP - 385
EP - 393
JO - Journal of Applied Crystallography
JF - Journal of Applied Crystallography
IS - 3
ER -