TY - JOUR
T1 - Structural, electrical and optical properties of indium chloride doped ZnO films synthesized by Ultrasonic Spray Pyrolysis technique
AU - Zaleta-Alejandre, E.
AU - Camargo-Martinez, J.
AU - Ramirez-Garibo, A.
AU - Pérez-Arrieta, M. L.
AU - Balderas-Xicohténcatl, R.
AU - Rivera-Alvarez, Z.
AU - Aguilar-Frutis, M.
AU - Falcony, C.
N1 - Funding Information:
The authors are thankful to the CONACyT and Physics Department of CINVESTAV-IPN for the financial support. We are also grateful to Marcela Guerrero, Rogelio Fragoso, Ana Soto, Miguel Galvan and Gilberto Alarcon for the technical support provided. M. Aguilar-Frutis acknowledges CONACYT-Mexico through grant number CB-2009-129227 .
PY - 2012/12/1
Y1 - 2012/12/1
N2 - Indium chloride doped zinc oxide (ZnO:In) thin films were deposited onto glass substrates using zinc acetate by Ultrasonic Spray Pyrolysis technique. The effect of substrate temperature, deposition time and acetic acid added to the spraying solution on the structural, electrical and optical properties of these ZnO:In films is reported. The films were in all cases polycrystalline with a hexagonal (wurtzite) structure, a transparency over 80% and resistivity of the order of 10- 3-10- 2 ω·cm. The resistivity was dependent on the volume % of acetic acid added to the spraying solution. The minimum resistivity value was obtained with a 5 vol.% acetic acid (pH = 3.71) at substrate temperature of 450 °C. The deposition rates obtained were as high as 180 Å·min- 1 at a substrate temperature of 450 °C.
AB - Indium chloride doped zinc oxide (ZnO:In) thin films were deposited onto glass substrates using zinc acetate by Ultrasonic Spray Pyrolysis technique. The effect of substrate temperature, deposition time and acetic acid added to the spraying solution on the structural, electrical and optical properties of these ZnO:In films is reported. The films were in all cases polycrystalline with a hexagonal (wurtzite) structure, a transparency over 80% and resistivity of the order of 10- 3-10- 2 ω·cm. The resistivity was dependent on the volume % of acetic acid added to the spraying solution. The minimum resistivity value was obtained with a 5 vol.% acetic acid (pH = 3.71) at substrate temperature of 450 °C. The deposition rates obtained were as high as 180 Å·min- 1 at a substrate temperature of 450 °C.
KW - Acetic acid
KW - Indium chloride doped zinc oxide
KW - Transparent conductive films
KW - Ultrasonic Spray Pyrolysis
UR - http://www.scopus.com/inward/record.url?scp=84869498515&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2012.09.050
DO - 10.1016/j.tsf.2012.09.050
M3 - Artículo
SN - 0040-6090
VL - 524
SP - 44
EP - 49
JO - Thin Solid Films
JF - Thin Solid Films
ER -