TY - JOUR
T1 - Strong white and blue photoluminescence from silicon nanocrystals in SiNx grown by remote PECVD using SiCl4/NH3
AU - Benami, A.
AU - Santana, G.
AU - Ortiz, A.
AU - Ponce, A.
AU - Romeu, D.
AU - Aguilar-Hernández, J.
AU - Contreras-Puente, G.
AU - Alonso, J. C.
PY - 2007/4/18
Y1 - 2007/4/18
N2 - Strong white and blue photoluminescence (PL) from as-grown silicon nanocrystals (nc-Si) in SiNx films prepared by remote plasma enhanced chemical vapour deposition using SiCl4/NH3 mixtures is reported. The colour and intensity of the PL could be controlled by adjusting the NH3 flow rate. Samples with white emission were annealed at 1000°C, obtaining a strong improvement of the PL intensity with a blue colour. The PL can be attributed to quantum confinement effect in nc-Si embedded in SiNx matrix, which is improved when a better passivation of nc-Si surface with chlorine and nitrogen atoms is obtained. The size, density and structure of the nc-Si in the as-grown and annealed films were confirmed and measured by high-resolution transmission electron microscopy.
AB - Strong white and blue photoluminescence (PL) from as-grown silicon nanocrystals (nc-Si) in SiNx films prepared by remote plasma enhanced chemical vapour deposition using SiCl4/NH3 mixtures is reported. The colour and intensity of the PL could be controlled by adjusting the NH3 flow rate. Samples with white emission were annealed at 1000°C, obtaining a strong improvement of the PL intensity with a blue colour. The PL can be attributed to quantum confinement effect in nc-Si embedded in SiNx matrix, which is improved when a better passivation of nc-Si surface with chlorine and nitrogen atoms is obtained. The size, density and structure of the nc-Si in the as-grown and annealed films were confirmed and measured by high-resolution transmission electron microscopy.
UR - http://www.scopus.com/inward/record.url?scp=33947417703&partnerID=8YFLogxK
U2 - 10.1088/0957-4484/18/15/155704
DO - 10.1088/0957-4484/18/15/155704
M3 - Artículo
SN - 0957-4484
VL - 18
JO - Nanotechnology
JF - Nanotechnology
IS - 15
M1 - 155704
ER -