TY - GEN
T1 - Proposal of a speed sensor based on FGMOS for a MEMS rotatory micromotor
AU - Sanchez-Marquez, Luis
AU - Reyes-Barranca, Mario Alfredo
AU - Abarca-Jimenez, Griselda Stephany
AU - Lopez-Tapia, Andrea
AU - Flores-Nava, Luis Martin
AU - Arellano-Cardenas, Oliverio
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/9
Y1 - 2019/9
N2 - This paper shows a proposal design of how to use a Floating-gate MOS transistor (FGMOS) for estimation of the rotational speed of a MEMS rotatory micromotor. The design is based on the 0.5 micron CMOS technology. With simulations carried out in SPICE, it is shown how the change in the capacitance between the control gate and the floating gate can be used to estimate the rotational speed of a micromotor.
AB - This paper shows a proposal design of how to use a Floating-gate MOS transistor (FGMOS) for estimation of the rotational speed of a MEMS rotatory micromotor. The design is based on the 0.5 micron CMOS technology. With simulations carried out in SPICE, it is shown how the change in the capacitance between the control gate and the floating gate can be used to estimate the rotational speed of a micromotor.
KW - FGMOS
KW - Micromotor
KW - Turning speed
UR - http://www.scopus.com/inward/record.url?scp=85075111989&partnerID=8YFLogxK
U2 - 10.1109/ICEEE.2019.8884574
DO - 10.1109/ICEEE.2019.8884574
M3 - Contribución a la conferencia
AN - SCOPUS:85075111989
T3 - 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019
BT - 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019
Y2 - 11 September 2019 through 13 September 2019
ER -