TY - GEN
T1 - Proposal for a rotary micromotor structure based on CMOS-MEMS technology
AU - Sanchez-Marquez, Luis
AU - Reyes-Barranca, Mario Alfredo
AU - Stephany Abarca-Jimenez, Griselda
AU - Lopez-Tapia, Andrea
AU - Flores-Nava, Luis Martin
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/11/11
Y1 - 2020/11/11
N2 - This paper shows a design proposal for a MEMS rotary micromotor based on the design rules of the 0.5 micron CMOS technology of On Semiconductor. With simulations carried out in COMSOL, the electrostatic behavior of the proposed micromotor is shown; the simulation helps us to know the maximum friction force that our design is capable of overcoming when the micromotor is powered with 18 volts.
AB - This paper shows a design proposal for a MEMS rotary micromotor based on the design rules of the 0.5 micron CMOS technology of On Semiconductor. With simulations carried out in COMSOL, the electrostatic behavior of the proposed micromotor is shown; the simulation helps us to know the maximum friction force that our design is capable of overcoming when the micromotor is powered with 18 volts.
KW - CMOS technology
KW - MEMS
KW - micromotor
UR - http://www.scopus.com/inward/record.url?scp=85099458679&partnerID=8YFLogxK
U2 - 10.1109/CCE50788.2020.9299176
DO - 10.1109/CCE50788.2020.9299176
M3 - Contribución a la conferencia
AN - SCOPUS:85099458679
T3 - 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020
BT - 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020
Y2 - 11 November 2020 through 13 November 2020
ER -