TY - JOUR
T1 - Precession electron diffraction-assisted crystal phase mapping of metastable c-GaN films grown on (001) GaAs
AU - Ruiz-Zepeda, Francisco
AU - Casallas-Moreno, Yenny L.
AU - Cantu-Valle, Jesus
AU - Alducin, Diego
AU - Santiago, Ulises
AU - José-Yacaman, Miguel
AU - López-López, Máximo
AU - Ponce, Arturo
N1 - Publisher Copyright:
© 2014 Wiley Periodicals, Inc.
PY - 2014/12/1
Y1 - 2014/12/1
N2 - The control growth of the cubic meta-stable nitride phase is a challenge because of the crystalline nature of the nitrides to grow in the hexagonal phase, and accurately identifying the phases and crystal orientations in local areas of the nitride semiconductor films is important for device applications. In this study, we obtained phase and orientation maps of a metastable cubic GaN thin film using precession electron diffraction (PED) under scanning mode with a point-to-point 1 nm probe size beam. The phase maps revealed a cubic GaN thin film with hexagonal GaN inclusions of columnar shape. The orientation maps showed that the inclusions have nucleation sites at the cubic GaN {111} facets. Different growth orientations of the inclusions were observed due to the possibility of the hexagonal {0001} plane to grow on any different {111} cubic facet. However, the generation of the hexagonal GaN inclusions is not always due to a 60° rotation of a {111} plane. These findings show the advantage of using PED along with phase and orientation mapping, and the analysis can be extended to differently composed semiconductor thin films. Microsc. Res. Tech. 77:980-985, 2014.
AB - The control growth of the cubic meta-stable nitride phase is a challenge because of the crystalline nature of the nitrides to grow in the hexagonal phase, and accurately identifying the phases and crystal orientations in local areas of the nitride semiconductor films is important for device applications. In this study, we obtained phase and orientation maps of a metastable cubic GaN thin film using precession electron diffraction (PED) under scanning mode with a point-to-point 1 nm probe size beam. The phase maps revealed a cubic GaN thin film with hexagonal GaN inclusions of columnar shape. The orientation maps showed that the inclusions have nucleation sites at the cubic GaN {111} facets. Different growth orientations of the inclusions were observed due to the possibility of the hexagonal {0001} plane to grow on any different {111} cubic facet. However, the generation of the hexagonal GaN inclusions is not always due to a 60° rotation of a {111} plane. These findings show the advantage of using PED along with phase and orientation mapping, and the analysis can be extended to differently composed semiconductor thin films. Microsc. Res. Tech. 77:980-985, 2014.
KW - Cubic GaN
KW - Phase mapping
KW - Precession electron diffraction
KW - TEM
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=84939263580&partnerID=8YFLogxK
U2 - 10.1002/jemt.22424
DO - 10.1002/jemt.22424
M3 - Artículo
SN - 1059-910X
VL - 77
SP - 980
EP - 985
JO - Microscopy Research and Technique
JF - Microscopy Research and Technique
IS - 12
ER -