Abstract
Cd-Te-In-O thin films are grown by pulsed laser deposition using a composite target of CdTe powder embedded in an indium matrix. Oxygen pressures range from 2.00 to 6.67 Pa at a substrate temperature of 420 °C. The structure, optical transmission and sheet resistance of the films are measured. Substitutional compounds with In2 - 2x(Cd,Te)2xO3 stoichiometry are found at high oxygen pressures. A ternary phase diagram of the CdO-In2O3-TeO2 system shows the relationship between the structure and the stoichiometry of the films. To evaluate film performance, a figure of merit is proposed based on the relationship between the integral photonic flux and the sheet resistance. The best figure of merit values corresponds to a sample prepared at 3.8 Pa O2 that consists of (In2O3)0.3(CdTe2O5)0.7 and exhibits an optical band gap of 3.0 eV. This sample is a suitable substrate for electrodeposition due to its good electrochemical stability.
Original language | English |
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Pages (from-to) | 413-418 |
Number of pages | 6 |
Journal | Thin Solid Films |
Volume | 518 |
Issue number | 1 |
DOIs | |
State | Published - 2 Nov 2009 |
Externally published | Yes |
Keywords
- CdO-TeO-InO
- Figure of merit
- ICTO
- PLD
- Phase diagram
- Solar cells
- TCO