Physical properties of transparent conducting Cd-Te-In-O thin films. Outlining a thermodynamic system for transparent conducting oxides

A. Martel, F. Caballero-Briones, R. Castro-Rodríguez, J. Méndez-Gamboa, N. Romeo, A. Bosio, J. L. Peña

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Cd-Te-In-O thin films are grown by pulsed laser deposition using a composite target of CdTe powder embedded in an indium matrix. Oxygen pressures range from 2.00 to 6.67 Pa at a substrate temperature of 420 °C. The structure, optical transmission and sheet resistance of the films are measured. Substitutional compounds with In2 - 2x(Cd,Te)2xO3 stoichiometry are found at high oxygen pressures. A ternary phase diagram of the CdO-In2O3-TeO2 system shows the relationship between the structure and the stoichiometry of the films. To evaluate film performance, a figure of merit is proposed based on the relationship between the integral photonic flux and the sheet resistance. The best figure of merit values corresponds to a sample prepared at 3.8 Pa O2 that consists of (In2O3)0.3(CdTe2O5)0.7 and exhibits an optical band gap of 3.0 eV. This sample is a suitable substrate for electrodeposition due to its good electrochemical stability.

Original languageEnglish
Pages (from-to)413-418
Number of pages6
JournalThin Solid Films
Volume518
Issue number1
DOIs
StatePublished - 2 Nov 2009
Externally publishedYes

Keywords

  • CdO-TeO-InO
  • Figure of merit
  • ICTO
  • PLD
  • Phase diagram
  • Solar cells
  • TCO

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