Photoluminescence and structure investigations of Si nano-crystals in amorphous silicon matrix

T. V. Torchynska, A. Vivas Hernandez, Yasuhiro Matsumoto, L. Khomenkova, L. Shcherbina

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

The influence of hot-wire-CVD regimes on light-emission and structural properties of Si nano-crystallites embedded in amorphous silicon was investigated. It was shown that a variation of temperature of the glass substrate and of the hot-wire allows the production of films with desirable parameters. Using X-ray diffraction and photoluminescence methods the dependence of photoluminescence properties on size of Si nano-crystallites is shown. The nature of light emission is discussed.

Original languageEnglish
Pages (from-to)1188-1191
Number of pages4
JournalJournal of Non-Crystalline Solids
Volume352
Issue number9-20 SPEC. ISS.
DOIs
StatePublished - 15 Jun 2006

Keywords

  • Chemical vapor deposition
  • Nano-crystals

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