Abstract
The influence of hot-wire-CVD regimes on light-emission and structural properties of Si nano-crystallites embedded in amorphous silicon was investigated. It was shown that a variation of temperature of the glass substrate and of the hot-wire allows the production of films with desirable parameters. Using X-ray diffraction and photoluminescence methods the dependence of photoluminescence properties on size of Si nano-crystallites is shown. The nature of light emission is discussed.
Original language | English |
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Pages (from-to) | 1188-1191 |
Number of pages | 4 |
Journal | Journal of Non-Crystalline Solids |
Volume | 352 |
Issue number | 9-20 SPEC. ISS. |
DOIs | |
State | Published - 15 Jun 2006 |
Keywords
- Chemical vapor deposition
- Nano-crystals