PHONON SOFTENING IN ULTRA HEAVILY DOPED Si AND Ge.

A. Compaan, G. Contreras, M. Cardona, A. Axmann

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Multiple pulse annealing with a XeCl laser (308 nm, 10 nsec, about 0. 8J/cm**2) has been used to produce flat concentration profiles following heavy implantations of Ga, B, P, and As at energies up to 350 kev. The influence of the free carrier concentration on the zone center phonon frequency has been studied by Raman scattering with violet and ultra-violet cw laser lines to ensure that only the implanted region was sampled. We find a softening of the zone center optic mode in Si:As (N//e approximately equals 3 multiplied by 10**2**1 cm** minus **3) of about 10 cm** minus **1 and for Si:B (N//p approximately equals 1 multiplied by 10**2**1 cm** minus **3) a softening of about 20 cm** minus **1.

Original languageEnglish
Title of host publicationJournal de Physique (Paris), Colloque
Pages197-201
Number of pages5
Edition10
DOIs
StatePublished - 1983
Externally publishedYes

Publication series

NameJournal de Physique (Paris), Colloque
Number10
Volume44
ISSN (Print)0449-1947

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