TY - JOUR
T1 - Phase transformation and light emission in Er-doped Si-rich HfO2 films prepared by magnetron sputtering
AU - Torchynska, Tetyana
AU - El Filali, Brahim
AU - Khomenkova, Larysa
AU - Portier, Xavier
AU - Gourbilleau, Fabrice
N1 - Publisher Copyright:
© 2019 Author(s).
PY - 2019/5/1
Y1 - 2019/5/1
N2 - The impact of phase transformation on the emission properties of Er-doped Si-rich HfO2 films obtained by RF magnetron sputtering has been investigated by means of the scanning electron microscopy, energy dispersive x-ray spectroscopy, x-ray diffraction, x-ray photoelectron spectroscopy, and photoluminescence techniques. It has been observed that thermal treatment of the films at 950 and 1100 °C governs a phase separation process. The formation of HfO2 nanocrystals of the tetragonal phase together with the Si-quantum dots (QDs) occurs at 950 °C. Upon annealing at 1100 °C, the tetragonal SiO2 and monoclinic HfO2 nanocrystals appear. The appearance of bright emission in the visible-near-infrared spectral range, related to the optical transitions in the 4f intrashell energy levels of Er ions, has been detected. The investigation of the annealing effect on the luminescent properties has revealed that the enhancement of Er3+ emission occurs due to an effective energy transfer from Si-QDs toward the Er ions. The oxidation of Si-QDs at high temperature annealing (1100 °C) leads to a reduction in the intensity of the Er ion related emission. Since hafnia-based materials have high density and are very sensitive to high-energy excitation, the results offer multifunctional applications of doped hafnia films, such as the luminescent materials for traditional phosphors.
AB - The impact of phase transformation on the emission properties of Er-doped Si-rich HfO2 films obtained by RF magnetron sputtering has been investigated by means of the scanning electron microscopy, energy dispersive x-ray spectroscopy, x-ray diffraction, x-ray photoelectron spectroscopy, and photoluminescence techniques. It has been observed that thermal treatment of the films at 950 and 1100 °C governs a phase separation process. The formation of HfO2 nanocrystals of the tetragonal phase together with the Si-quantum dots (QDs) occurs at 950 °C. Upon annealing at 1100 °C, the tetragonal SiO2 and monoclinic HfO2 nanocrystals appear. The appearance of bright emission in the visible-near-infrared spectral range, related to the optical transitions in the 4f intrashell energy levels of Er ions, has been detected. The investigation of the annealing effect on the luminescent properties has revealed that the enhancement of Er3+ emission occurs due to an effective energy transfer from Si-QDs toward the Er ions. The oxidation of Si-QDs at high temperature annealing (1100 °C) leads to a reduction in the intensity of the Er ion related emission. Since hafnia-based materials have high density and are very sensitive to high-energy excitation, the results offer multifunctional applications of doped hafnia films, such as the luminescent materials for traditional phosphors.
UR - http://www.scopus.com/inward/record.url?scp=85062863251&partnerID=8YFLogxK
U2 - 10.1116/1.5085143
DO - 10.1116/1.5085143
M3 - Artículo
AN - SCOPUS:85062863251
SN - 0734-2101
VL - 37
JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
IS - 3
M1 - 031503
ER -