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Optical strain measurement in ultrathin sSOI wafer
J. Munguía, H. Chouaib, J. de la Torre, G. Bremond, C. Bru-Chevallier, A. Sibai, B. Champagnon, M. Moreau, J. M. Bluet
Research output: Contribution to journal › Article › peer-review
13
Scopus
citations