Optical investigation of Si nano-crystals in amorphous silicon matrix

A. Vivas Hernandez, T. V. Torchynska, Y. Matsumoto, S. Jimenez Sandoval, M. Dybiec, S. Ostapenko, L. V. Shcherbina

Research output: Contribution to journalConference articlepeer-review

15 Scopus citations

Abstract

Paper presents the comparative investigation of photoluminescence and Raman scattering spectra of pure amorphous silicon films and amorphous silicon films with different size Si nanocrystallites. Several PL bands in the IR spectral range with maxima at 0.90, 0.98, 1.14 and 1.36 eV have been revealed in studied samples. The 0.90-0.98 eV PL bands are attributed to the band tail luminescence in Si nano crystallites with the size of 15-20 nm. Concurrently, the 1.18 and 1.36 eV PL bands are connected, apparently, with radiative transition between quantum confined levels within Si QDs (size of 5-6 nm) embedded into a-Si matrix.

Translated title of the contributionInvestigación óptica de nanocristales de Si en matriz de silicio amorfo
Original languageEnglish
Pages (from-to)510-513
Number of pages4
JournalMicroelectronics Journal
Volume36
Issue number3-6
DOIs
StatePublished - Mar 2005

Keywords

  • Amorphous Si
  • Band tail luminescence
  • Si QD luminescence

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