Optical and structural studies of silicon-enriched films obtained by dc-magnetron co-sputtering

J. R. Aguilar-Hernández, G. Monroy-Rodríguez, M. Cárdenas-García, G. S. Contreras-Puente

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Abstract

We present in this work preliminary studies concerning the optical characterization, by optical absorption, photoluminescence and Raman spectroscopies, of Si-enriched films into a SiO2 matrix as a function of the Si concentration. The Si-molar concentration dependence shows different characteristics for each one of the samples: low Si concentration samples (lower than 50 mol% of silicon) showed, at room temperature, a low energy PL band around 1.6 eV, whereas samples with higher concentration (> 50 mol% of silicon) showed a PL band at 2.27 eV. Raman spectra of the samples account for different characteristics: low Si concentration samples showed a contribution of the amorphous phase of SiO2, whereas for high Si concentration samples, a relaxation of the selection rules is observed. Discussion and analysis of the experimental results are presented.

Original languageEnglish
Pages (from-to)1074-1077
Number of pages4
JournalMaterials Science and Engineering C
Volume27
Issue number5-8 SPEC. ISS.
DOIs
StatePublished - Sep 2007

Keywords

  • Optical properties
  • Photoluminescence
  • SiO matrix
  • Silicon nanoparticles

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