Optical and structural characteristics of Y₂O₃ thin films synthesized from yttrium acetylacetonate

Yttrium oxide thin films are deposited on silicon substrates using the ultrasonic spray pyrolysis technique from the thermal decomposition of a β-diketonate, yttrium acetylacetonate (Y(acac)₃). The decomposition of Y(acac)₃ was studied by thermogravimetry, differential scanning calorimetry, mass spectrometry, and infrared spectroscopy. It was found that a β-diketone ligand is lost during the initial steps of decomposition of the Y(acac)₃. The rest of the complex is then dissociated or degraded partially until Y₂O₃ is obtained in the final step with the presence of carbon related residues. Then the Y(acac)₃ was used to synthesize Y₂O₃ thin films using the spray pyrolysis technique. The films were deposited on silicon substrates at temperatures in the range of 400-550 °C. The films were characterized by ellipsometry, infrared spectroscopy, atomic force microscopy, and X-ray diffraction. The films presented a low surface roughness with an index of refraction close to 1.8. The crystalline structure of the films depended on the substrate temperature; films deposited at 400 °C were mainly amorphous, but higher deposition temperatures (450-550 °C), resulted in polycrystalline with a cubic crystalline phase.