Optical and electrical properties of (002)-Oriented ZnO films prepared on amorphous substrates by sol-gel spin-coating

Gonzalo Alonso Velázquez-Nevárez, Jorge Roberto Vargas-García, Jorge Aguilar-Hernández, Oscar Edgardo Vega-Becerra, Fei Chen, Qiang Shen, Lianmeng Zhang

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24 Scopus citations

Abstract

Zinc oxide (ZnO) films were prepared on amorphous quartz substrates by sol-gel spin-coating using Zn(CH3COO) 2 2H2O precursor. Isopropanol, ethanol and 2-methoxyethanol were used as solvents. The film drying temperature was kept constant at 200 °C and the annealing temperature was varied from 400 to 800 °C. Highly transparent and (002)-oriented hexagonal wurtzite-type ZnO films were obtained using isopropanol solvent. The ZnO films prepared at Tanneal = 600 °C showed the highest (002) preferential orientation, however it was not the significant feature to achieve low resistivity. The uniform and (002)-oriented ZnO films prepared at Tanneal = 400 °C display the highest transmittance (>93% in the visible region) and the lowest resistivity (7.1 Ωcm).

Original languageEnglish
Pages (from-to)113-117
Number of pages5
JournalMaterials Research
Volume19
DOIs
StatePublished - Dec 2016

Keywords

  • Oriented films
  • Transparent and conductive films
  • Zinc oxide films

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