Nature of visible luminescence of co-sputtered Si-SiOx systems

T. Torchynska, F. G. Becerril Espinoza, Y. Goldstein, E. Savir, J. Jedrzejewski, L. Khomenkova, N. Korsunska, V. Yukhimchuk

Research output: Contribution to journalConference articlepeer-review

12 Scopus citations

Abstract

Photoluminescence (PL) spectra and Raman scattering spectra of Si-SiO x systems, prepared by radio frequency magnetron sputtering method and thermal annealed at 1150°C for creation of Si nano-crystallites, were investigated as a function of Si content and Si nano-crystallite sizes. It was shown that the PL spectrum of such systems consists of several bands with peak positions at 1.32-1.34, 1.42-1.58, 1.77, 2.05 and 2.30eV. The dependencies of these PL band parameters on concentration and size of Si nano-crystallites in the Si-SiOx system have been investigated and analyzed. The nature of radiative optical transitions for all PL bands is discussed.

Translated title of the contributionNaturaleza de la luminiscencia visible de los sistemas Si- SiOx co-pulverizados
Original languageEnglish
Pages (from-to)1119-1123
Number of pages5
JournalPhysica B: Condensed Matter
Volume340-342
DOIs
StatePublished - 31 Dec 2003
EventProceedings of the 22nd International Conference on Defects in (ICDS-22) - Aarhus, Denmark
Duration: 28 Jul 20031 Aug 2003

Keywords

  • Photoluminescence
  • Quantum dots

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