Micromotors unit based on CMOS-MEMS technology integrated on a single chip

Andrea Lopez-Tapia; Luis Sanchez-Marquez; Mario Alfredo Reyes-Barranca; Griselda Stephany Abarca-Jimenez; Luis Martin Flores-Nava

doi:10.1109/CCE53527.2021.9633117

Micromotors unit based on CMOS-MEMS technology integrated on a single chip

Andrea Lopez-Tapia, Luis Sanchez-Marquez, Mario Alfredo Reyes-Barranca, Griselda Stephany Abarca-Jimenez, Luis Martin Flores-Nava

Unidad Profesional Interdisciplinaria de Ingeniería, Campus Hidalgo (UPIIH)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper shows the design for MEMS linear and rotary micromotors including their respective control circuits, elevation voltage stage and sensors, all together in a single chip. They were designed under the rules of the standard 0.5-micron CMOS technology of On Semiconductor. With simulations carried out in OrCAD PSPice, the designed control circuits of both linear and rotary micromotors were tested; the simulation helps us to verify their correct operation. Finally, the elevation voltage stage between control circuit and electrodes allows the application of the necessary voltage to drive the micromotors.

Original language	English
Title of host publication	CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781665400299
DOIs	https://doi.org/10.1109/CCE53527.2021.9633117
State	Published - 2021
Event	18th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2021 - Mexico City, Mexico Duration: 10 Nov 2021 → 12 Nov 2021

Publication series

Name	CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control

Conference

Conference	18th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2021
Country/Territory	Mexico
City	Mexico City
Period	10/11/21 → 12/11/21

Keywords

CMOS technology
FGMOS
MEMS
micromotor

Access to Document

10.1109/CCE53527.2021.9633117

Cite this

Lopez-Tapia, A., Sanchez-Marquez, L., Reyes-Barranca, M. A., Abarca-Jimenez, G. S., & Flores-Nava, L. M. (2021). Micromotors unit based on CMOS-MEMS technology integrated on a single chip. In CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CCE53527.2021.9633117

Lopez-Tapia, Andrea ; Sanchez-Marquez, Luis ; Reyes-Barranca, Mario Alfredo et al. / Micromotors unit based on CMOS-MEMS technology integrated on a single chip. CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control. Institute of Electrical and Electronics Engineers Inc., 2021. (CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control).

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title = "Micromotors unit based on CMOS-MEMS technology integrated on a single chip",

abstract = "This paper shows the design for MEMS linear and rotary micromotors including their respective control circuits, elevation voltage stage and sensors, all together in a single chip. They were designed under the rules of the standard 0.5-micron CMOS technology of On Semiconductor. With simulations carried out in OrCAD PSPice, the designed control circuits of both linear and rotary micromotors were tested; the simulation helps us to verify their correct operation. Finally, the elevation voltage stage between control circuit and electrodes allows the application of the necessary voltage to drive the micromotors.",

keywords = "CMOS technology, FGMOS, MEMS, micromotor",

author = "Andrea Lopez-Tapia and Luis Sanchez-Marquez and Reyes-Barranca, {Mario Alfredo} and Abarca-Jimenez, {Griselda Stephany} and Flores-Nava, {Luis Martin}",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 18th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2021 ; Conference date: 10-11-2021 Through 12-11-2021",

year = "2021",

doi = "10.1109/CCE53527.2021.9633117",

language = "Ingl{\'e}s",

series = "CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control",

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Lopez-Tapia, A, Sanchez-Marquez, L, Reyes-Barranca, MA, Abarca-Jimenez, GS & Flores-Nava, LM 2021, Micromotors unit based on CMOS-MEMS technology integrated on a single chip. in CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control. CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control, Institute of Electrical and Electronics Engineers Inc., 18th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2021, Mexico City, Mexico, 10/11/21. https://doi.org/10.1109/CCE53527.2021.9633117

Micromotors unit based on CMOS-MEMS technology integrated on a single chip. / Lopez-Tapia, Andrea; Sanchez-Marquez, Luis; Reyes-Barranca, Mario Alfredo et al.
CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control. Institute of Electrical and Electronics Engineers Inc., 2021. (CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Micromotors unit based on CMOS-MEMS technology integrated on a single chip

AU - Lopez-Tapia, Andrea

AU - Sanchez-Marquez, Luis

AU - Reyes-Barranca, Mario Alfredo

AU - Abarca-Jimenez, Griselda Stephany

AU - Flores-Nava, Luis Martin

PY - 2021

Y1 - 2021

N2 - This paper shows the design for MEMS linear and rotary micromotors including their respective control circuits, elevation voltage stage and sensors, all together in a single chip. They were designed under the rules of the standard 0.5-micron CMOS technology of On Semiconductor. With simulations carried out in OrCAD PSPice, the designed control circuits of both linear and rotary micromotors were tested; the simulation helps us to verify their correct operation. Finally, the elevation voltage stage between control circuit and electrodes allows the application of the necessary voltage to drive the micromotors.

AB - This paper shows the design for MEMS linear and rotary micromotors including their respective control circuits, elevation voltage stage and sensors, all together in a single chip. They were designed under the rules of the standard 0.5-micron CMOS technology of On Semiconductor. With simulations carried out in OrCAD PSPice, the designed control circuits of both linear and rotary micromotors were tested; the simulation helps us to verify their correct operation. Finally, the elevation voltage stage between control circuit and electrodes allows the application of the necessary voltage to drive the micromotors.

KW - CMOS technology

KW - FGMOS

KW - MEMS

KW - micromotor

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U2 - 10.1109/CCE53527.2021.9633117

DO - 10.1109/CCE53527.2021.9633117

M3 - Contribución a la conferencia

AN - SCOPUS:85123826975

T3 - CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control

BT - CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 18th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2021

Y2 - 10 November 2021 through 12 November 2021

ER -

Lopez-Tapia A, Sanchez-Marquez L, Reyes-Barranca MA, Abarca-Jimenez GS, Flores-Nava LM. Micromotors unit based on CMOS-MEMS technology integrated on a single chip. In CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control. Institute of Electrical and Electronics Engineers Inc. 2021. (CCE 2021 - 2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control). doi: 10.1109/CCE53527.2021.9633117

Micromotors unit based on CMOS-MEMS technology integrated on a single chip

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