Metastable defects in Si₃N₄ layers accessed by scanning photoluminescence

Engineering & Materials Science

• Photoluminescence 100%
• Scanning 47%
• Defects 42%
• Luminescence 34%
• Silicon 12%
• Laser beams 8%
• Topography 8%
• Solar cells 8%
• Crystalline materials 8%
• Annealing 7%
• Lasers 5%
• Temperature 3%

Physics & Astronomy

• photoluminescence 43%
• scanning 38%
• defects 34%
• luminescence 17%
• wafers 11%
• silicon 8%
• ultraviolet lasers 8%
• grade 7%
• ribbons 7%
• topography 7%
• solar cells 5%
• laser beams 5%
• annealing 4%
• room temperature 4%
• excitation 3%
• lasers 3%

Chemistry

• Photoluminescence 47%
• Luminiscence Type 16%
• Solar Cell 6%
• Annealing 6%
• Ambient Reaction Temperature 4%
• Liquid Film 3%