Influence of the surrounding host in obtaining tunable and strong visible photoluminescence from silicon nanoparticles

G. Santana, B. M. Monroy, A. Ortiz, L. Huerta, J. C. Alonso, J. Fandiño, J. Aguilar-Hernández, E. Hoyos, F. Cruz-Gandarilla, G. Contreras-Puentes

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41 Scopus citations

Abstract

We have investigated the influence of the microstructure and chemistry of the surrounding host on the strong visible photoluminescence (PL) from silicon nanoclusters (nc-Si) embedded in three different silicon-based dielectric compounds: Six Ny: H,Cl, Six Ny Oz: H,Cl, and Six Oz: H,Cl, obtained from silicon nitride films deposited by Si H2 Cl2 N H3 H2 plasma-enhanced chemical vapor deposition at different growth pressures. A blueshift is found in the PL coming from the nc-Si as the content of oxygen in the surrounding host is increased, and a significant improvement in PL intensity is achieved when the nc-Si are well passivated with O instead of H. We discuss the PL behavior in terms of the quantum confinement model and passivation state of the nc-Si surface.

Original languageEnglish
Article number041916
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume88
Issue number4
DOIs
StatePublished - 2006

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