TY - JOUR
T1 - Influence of substrate temperature on morphological and ferroelectric properties of Ba0.75Sr0.25TiO3 thin films deposited on nichrome substrates by Rf sputtering
AU - Mancilla, J. E.
AU - Rivera, J. N.
AU - Hernández, C. A.
AU - Márquez-Herrera, A.
AU - Zapata-Torres, M. G.
N1 - Funding Information:
The work was financially supported by the Instituto Politécnico Nacional , through projects SIP-20110843 and SIP-20121316 .
PY - 2013/8
Y1 - 2013/8
N2 - Abstract Ba0.75Sr0.25TiO3 (BST) thin films have been deposited by Rf-sputtering on nichrome substrates that have been heated in the range from 400 C to 747 C. The films were characterized morphologically and ferroelectrically. The microstructure of thin films was observed using an atomic force microscope to determine rugosity and grain size. The growth of grain size observed was 75 nm and 95 nm at substrate temperatures from 549 C to 747 C, respectively. The ferroelectric properties were determined by hysteresis loops applying an electric field of 110 kV/cm. The films grown at substrate temperatures from 549 C to 747 C show a decrease of the remnant polarization Pr, from 9.87μC/cm2 to 2.23μC/ cm2, and of the coercive field strength Ec, from 59.75 kV/cm to 19.86 kV/cm. The films deposited on nichrome had uniform grain size distribution and relatively low surface roughness.
AB - Abstract Ba0.75Sr0.25TiO3 (BST) thin films have been deposited by Rf-sputtering on nichrome substrates that have been heated in the range from 400 C to 747 C. The films were characterized morphologically and ferroelectrically. The microstructure of thin films was observed using an atomic force microscope to determine rugosity and grain size. The growth of grain size observed was 75 nm and 95 nm at substrate temperatures from 549 C to 747 C, respectively. The ferroelectric properties were determined by hysteresis loops applying an electric field of 110 kV/cm. The films grown at substrate temperatures from 549 C to 747 C show a decrease of the remnant polarization Pr, from 9.87μC/cm2 to 2.23μC/ cm2, and of the coercive field strength Ec, from 59.75 kV/cm to 19.86 kV/cm. The films deposited on nichrome had uniform grain size distribution and relatively low surface roughness.
KW - B. Grain size
KW - C. Ferroelectric properties
KW - D. BaTiO and titanates
KW - Rf-sputtering process
UR - http://www.scopus.com/inward/record.url?scp=84877715397&partnerID=8YFLogxK
U2 - 10.1016/j.ceramint.2013.02.060
DO - 10.1016/j.ceramint.2013.02.060
M3 - Artículo
SN - 0272-8842
VL - 39
SP - 7167
EP - 7172
JO - Ceramics International
JF - Ceramics International
IS - 6
ER -