Indium-doped zinc oxide thin films deposited by chemical spray starting from zinc acetylacetonate: Effect of the alcohol and substrate temperature

A. Maldonado, M. De La Luz Olvera, S. Tirado Guerra, R. Asomoza

Research output: Contribution to journalConference articlepeer-review

42 Scopus citations

Abstract

Highly conductive and transparent indium-doped zinc oxide thin films were deposited by the chemical spray technique on sodocalcic glass substrates starting from zinc acetylacetonate. The role of the type of alcohols, namely, methanol, ethanol and isopropyl and the substrate temperature on the electrical, structural, surface morphology and optical characteristics of the thin films were studied. The results show that some of the physical characteristics under study are effectively modified by the temperature as well as the kind of the alcohol used. A resistivity value of 3 × 10-3Ωcm with a mobility of 6cm2/(Vs) and a carrier concentration of 10 21cm-3 were found for the best films. All the films were polycrystalline fitting well with a hexagonal wurtzite structure. High texture surface, which enhance light trapping was observed in films deposited with an ethanol-containing solution. The transmittance of the films is higher than 85% in all the cases, and a band gap value of around 3.3eV was also found.

Translated title of the contributionelículas delgadas de óxido de zinc dopado con indio depositadas por aspersión química a partir de acetilacetonato de zinc: efecto del alcohol y la temperatura del sustrato
Original languageEnglish
Pages (from-to)75-84
Number of pages10
JournalSolar Energy Materials and Solar Cells
Volume82
Issue number1-2
DOIs
StatePublished - 1 May 2004
EventCancun 2003 - Cancun, Mexico
Duration: 17 Aug 200321 Aug 2003

Keywords

  • Chemical spray
  • Semiconductor oxides
  • Thin films
  • Zinc oxide

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