Improved electrical, optical, and structural properties of undoped ZnO thin films grown by water-mist-assisted spray pyrolysis

L. Martínez Pérez; M. Aguilar-Frutis; O. Zelaya-Angel; N. Muñoz Aguirre

doi:10.1002/pssa.200521207

Improved electrical, optical, and structural properties of undoped ZnO thin films grown by water-mist-assisted spray pyrolysis

L. Martínez Pérez, M. Aguilar-Frutis, O. Zelaya-Angel, N. Muñoz Aguirre

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Undoped ZnO thin films were prepared using the ultrasonic spray pyrolysis deposition technique with zinc acetylacetonate dissolved in N,N- dimethylformamide as the source materials solution. The addition of water mist in a parallel flux to the spray solution stream was also used during deposition of the films. The addition of water mist improved the electrical characteristics of the ZnO films. Fresh ZnO samples were then thermally annealed in a H ₂ reducing atmosphere. X-ray diffraction patterns show mainly the wurzite crystalline ZnO phase in the films. An electrical resistivity (p) of around 2.7 × 10 ^-2 Ω cm was measured at room temperature for the best undoped ZnO film, p is approximately one order of magnitude lower than the resistivities found in undoped ZnO films obtained by means of similar non-vacuum deposition techniques.

Original language	English
Pages (from-to)	2411-2417
Number of pages	7
Journal	Physica Status Solidi (A) Applications and Materials Science
Volume	203
Issue number	10
DOIs	https://doi.org/10.1002/pssa.200521207
State	Published - Aug 2006
Externally published	Yes

Access to Document

10.1002/pssa.200521207

Cite this

@article{f740f0b47d4046659d149f941ecdc687,

title = "Improved electrical, optical, and structural properties of undoped ZnO thin films grown by water-mist-assisted spray pyrolysis",

abstract = "Undoped ZnO thin films were prepared using the ultrasonic spray pyrolysis deposition technique with zinc acetylacetonate dissolved in N,N- dimethylformamide as the source materials solution. The addition of water mist in a parallel flux to the spray solution stream was also used during deposition of the films. The addition of water mist improved the electrical characteristics of the ZnO films. Fresh ZnO samples were then thermally annealed in a H 2 reducing atmosphere. X-ray diffraction patterns show mainly the wurzite crystalline ZnO phase in the films. An electrical resistivity (p) of around 2.7 × 10 -2 Ω cm was measured at room temperature for the best undoped ZnO film, p is approximately one order of magnitude lower than the resistivities found in undoped ZnO films obtained by means of similar non-vacuum deposition techniques.",

author = "P{\'e}rez, {L. Mart{\'i}nez} and M. Aguilar-Frutis and O. Zelaya-Angel and Aguirre, {N. Mu{\~n}oz}",

year = "2006",

month = aug,

doi = "10.1002/pssa.200521207",

language = "Ingl{\'e}s",

volume = "203",

pages = "2411--2417",

journal = "Physica Status Solidi (A) Applications and Materials Science",

issn = "1862-6300",

number = "10",

}

Improved electrical, optical, and structural properties of undoped ZnO thin films grown by water-mist-assisted spray pyrolysis. / Pérez, L. Martínez; Aguilar-Frutis, M.; Zelaya-Angel, O. et al.
In: Physica Status Solidi (A) Applications and Materials Science, Vol. 203, No. 10, 08.2006, p. 2411-2417.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Improved electrical, optical, and structural properties of undoped ZnO thin films grown by water-mist-assisted spray pyrolysis

AU - Pérez, L. Martínez

AU - Aguilar-Frutis, M.

AU - Zelaya-Angel, O.

AU - Aguirre, N. Muñoz

PY - 2006/8

Y1 - 2006/8

N2 - Undoped ZnO thin films were prepared using the ultrasonic spray pyrolysis deposition technique with zinc acetylacetonate dissolved in N,N- dimethylformamide as the source materials solution. The addition of water mist in a parallel flux to the spray solution stream was also used during deposition of the films. The addition of water mist improved the electrical characteristics of the ZnO films. Fresh ZnO samples were then thermally annealed in a H 2 reducing atmosphere. X-ray diffraction patterns show mainly the wurzite crystalline ZnO phase in the films. An electrical resistivity (p) of around 2.7 × 10 -2 Ω cm was measured at room temperature for the best undoped ZnO film, p is approximately one order of magnitude lower than the resistivities found in undoped ZnO films obtained by means of similar non-vacuum deposition techniques.

AB - Undoped ZnO thin films were prepared using the ultrasonic spray pyrolysis deposition technique with zinc acetylacetonate dissolved in N,N- dimethylformamide as the source materials solution. The addition of water mist in a parallel flux to the spray solution stream was also used during deposition of the films. The addition of water mist improved the electrical characteristics of the ZnO films. Fresh ZnO samples were then thermally annealed in a H 2 reducing atmosphere. X-ray diffraction patterns show mainly the wurzite crystalline ZnO phase in the films. An electrical resistivity (p) of around 2.7 × 10 -2 Ω cm was measured at room temperature for the best undoped ZnO film, p is approximately one order of magnitude lower than the resistivities found in undoped ZnO films obtained by means of similar non-vacuum deposition techniques.

UR - http://www.scopus.com/inward/record.url?scp=33748413301&partnerID=8YFLogxK

U2 - 10.1002/pssa.200521207

DO - 10.1002/pssa.200521207

M3 - Artículo

SN - 1862-6300

VL - 203

SP - 2411

EP - 2417

JO - Physica Status Solidi (A) Applications and Materials Science

JF - Physica Status Solidi (A) Applications and Materials Science

IS - 10

ER -

Improved electrical, optical, and structural properties of undoped ZnO thin films grown by water-mist-assisted spray pyrolysis

Abstract

Access to Document

Other files and links

Fingerprint

Cite this