TY - JOUR
T1 - Hermetic capacitive pressure sensors for biomedical applications
AU - Diaz-Alonso, Daniela
AU - Moreno-Moreno, Mario
AU - Zuñiga, Carlos
AU - Molina, Joel
AU - Calleja, Wilfrido
AU - Cisneros, Juan Carlos
AU - De Rivera, Luis Niño
AU - Ponomaryov, Volodymir
AU - Gil, Felix
AU - Guillen, Angel
AU - Rubio, Efrain
N1 - Publisher Copyright:
© Emerald Group Publishing Limited.
PY - 2016
Y1 - 2016
N2 - Purpose-This paper aims to purpose the new design and fabrication scheme of Touch Mode Capacitive Pressure Sensor (TMCPS), which can be used in a wireless integrated resistor, inductor and capacitor circuit for monitoring pressure in biomedical applications. Design/methodology/approach-This study focuses on the design, simulation and fabrication of dynamic capacitors, based on surface micromachining using polysilicon or aluminum films as the top electrode, both structural materials are capped with a 1.5m-thick polyimide film. Findings-The design of microstructures using a composite model fits perfectly the preset mechanical behavior. After the full fabrication, the dynamic capacitors show complete mechanical flexibility and stability. Originality/value-The novelty of the method presented in this study includes two important aspects: first, the capacitors are designed as a planar cavity within a rigid frame, where two walls contain channels which allow for the etching of the sacrificial material. Second, the electromechanical structures are designed using a composite model that includes a polyimide film capping for a precise pressure sensing, which also protects the internal cavity and, at the same time, provides full biocompatibility.
AB - Purpose-This paper aims to purpose the new design and fabrication scheme of Touch Mode Capacitive Pressure Sensor (TMCPS), which can be used in a wireless integrated resistor, inductor and capacitor circuit for monitoring pressure in biomedical applications. Design/methodology/approach-This study focuses on the design, simulation and fabrication of dynamic capacitors, based on surface micromachining using polysilicon or aluminum films as the top electrode, both structural materials are capped with a 1.5m-thick polyimide film. Findings-The design of microstructures using a composite model fits perfectly the preset mechanical behavior. After the full fabrication, the dynamic capacitors show complete mechanical flexibility and stability. Originality/value-The novelty of the method presented in this study includes two important aspects: first, the capacitors are designed as a planar cavity within a rigid frame, where two walls contain channels which allow for the etching of the sacrificial material. Second, the electromechanical structures are designed using a composite model that includes a polyimide film capping for a precise pressure sensing, which also protects the internal cavity and, at the same time, provides full biocompatibility.
KW - Biomedical sensors
KW - Polyimide films
KW - Pressure sensors
KW - Surface micromachining
KW - Touch-Mode capacitive devices
UR - http://www.scopus.com/inward/record.url?scp=84971310288&partnerID=8YFLogxK
U2 - 10.1108/MI-05-2015-0046
DO - 10.1108/MI-05-2015-0046
M3 - Artículo
SN - 1356-5362
VL - 33
SP - 79
EP - 86
JO - Microelectronics International
JF - Microelectronics International
IS - 2
ER -