TY - JOUR
T1 - Formation of indium-doped zinc oxide thin films using ultrasonic spray pyrolysis
T2 - The importance of the water content in the aerosol solution and the substrate temperature for enhancing electrical transport
AU - Biswal, Rajesh
AU - Castañeda, Luis
AU - Moctezuma, Rosario
AU - Vega-Pérez, Jaime
AU - Olvera, María De La Luz
AU - Maldonado, Arturo
PY - 2012
Y1 - 2012
N2 - Indium doped zinc oxide [ZnO:In] thin films have been deposited at 430°C on soda-lime glass substrates by the chemical spray technique, starting from zinc acetate and indium acetate. Pulverization of the solution was done by ultrasonic excitation. The variations in the electrical, structural, optical, and morphological characteristics of ZnO:In thin films, as a function of both the water content in the starting solution and the substrate temperature, were studied. The electrical resistivity of ZnO:In thin films is not significantly affected with the increase in the water content, up to 200 mL/L; further increase in water content causes an increase in the resistivity of the films. All films show a polycrystalline character, fitting well with the hexagonal ZnO wurtzite-type structure. No preferential growth in samples deposited with the lowest water content was observed, whereas an increase in water content gave rise to a (002) growth. The surface morphology of the filmsshows a consistency with structure results, as non-geometrical shaped round grains were observed in the case of films deposited with the lowest water content, whereas hexagonal slices, with a wide size distribution were observed in the other cases. In addition, films deposited with the highest water content show a narrow size distribution.
AB - Indium doped zinc oxide [ZnO:In] thin films have been deposited at 430°C on soda-lime glass substrates by the chemical spray technique, starting from zinc acetate and indium acetate. Pulverization of the solution was done by ultrasonic excitation. The variations in the electrical, structural, optical, and morphological characteristics of ZnO:In thin films, as a function of both the water content in the starting solution and the substrate temperature, were studied. The electrical resistivity of ZnO:In thin films is not significantly affected with the increase in the water content, up to 200 mL/L; further increase in water content causes an increase in the resistivity of the films. All films show a polycrystalline character, fitting well with the hexagonal ZnO wurtzite-type structure. No preferential growth in samples deposited with the lowest water content was observed, whereas an increase in water content gave rise to a (002) growth. The surface morphology of the filmsshows a consistency with structure results, as non-geometrical shaped round grains were observed in the case of films deposited with the lowest water content, whereas hexagonal slices, with a wide size distribution were observed in the other cases. In addition, films deposited with the highest water content show a narrow size distribution.
KW - Thin solid films
KW - Ultrasonic spray pyrolysis
KW - Zinc oxide
UR - http://www.scopus.com/inward/record.url?scp=84868248291&partnerID=8YFLogxK
U2 - 10.3390/ma5030432
DO - 10.3390/ma5030432
M3 - Artículo
SN - 1996-1944
VL - 5
SP - 432
EP - 442
JO - Materials
JF - Materials
IS - 3
ER -