TY - GEN
T1 - Floating gate MOSFET circuit design for a monolithic MEMS gas sensor
AU - Reyes-Barranca, M. A.
AU - Mendoza-Acevedo, S.
AU - Ávila-García, A.
AU - González-Vidal, J. L.
AU - Flores-Nava, L. M.
PY - 2009
Y1 - 2009
N2 - Gas sensors based on various principles and configurations have been studied for several years. Some of them are based on resistance variation of sensing layers. On the other hand, floating-gate MOSFETs can modify its threshold voltage by means of a chemical reaction. Here a study is made to prove that the charge produced by such chemical reaction can affect the voltage upon the floating gate. An analysis of a reading circuit with an FG-MOS as the transducer is made, showing this approximation as a promising alternative for gas sensors. A very simple design can be made for fabrication of a monolithic gas sensing system, by using a standard technology, supported in a MEMS structure for thermal isolation purposes. In order to show feasibility of this idea, experimental data is obtained using a conventional MOSFET and an Fe 2O3 layer, showing that the system can be used as a gas sensor.
AB - Gas sensors based on various principles and configurations have been studied for several years. Some of them are based on resistance variation of sensing layers. On the other hand, floating-gate MOSFETs can modify its threshold voltage by means of a chemical reaction. Here a study is made to prove that the charge produced by such chemical reaction can affect the voltage upon the floating gate. An analysis of a reading circuit with an FG-MOS as the transducer is made, showing this approximation as a promising alternative for gas sensors. A very simple design can be made for fabrication of a monolithic gas sensing system, by using a standard technology, supported in a MEMS structure for thermal isolation purposes. In order to show feasibility of this idea, experimental data is obtained using a conventional MOSFET and an Fe 2O3 layer, showing that the system can be used as a gas sensor.
KW - FGMOS
KW - Gas sensor
KW - MEMS
UR - http://www.scopus.com/inward/record.url?scp=70949087680&partnerID=8YFLogxK
U2 - 10.1145/1601896.1601946
DO - 10.1145/1601896.1601946
M3 - Contribución a la conferencia
AN - SCOPUS:70949087680
SN - 9781605587059
T3 - Proceedings of the 22nd Symposium on Integrated Circuits and Systems Design, SBCCI 2009
BT - Proceedings of the 22nd Symposium on Integrated Circuits and Systems Design, SBCCI 2009
T2 - 22nd Symposium on Integrated Circuits and Systems Design, SBCCI 2009
Y2 - 31 August 2009 through 3 September 2009
ER -