Finite element method and genetic algorithm for MEMS analysis

J. I. Chairez, V. H. Ortiz

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents an analysis of the finite element method (FEM) and genetic algorithms for the MEMS analysis and BIOMEMS design. The finite element method is the method used for the computational analysis of mechanical structures in MEMS, BIOMEMS, among others. However, the FEM presents a major drawback: the generation of mesh does not meet any criterion optimization, which in turn prevents ensure the best possible reproduction of the structure to analyze. Genetic algorithms are a particularly robust computational method, which have demonstrated their ability to solve problems where optimization requires adjustment of a large number of parameters (multivariate) even when they are not competing performance indices (multiobjective). In addition, in order to improve the process, it can be a good way to educate mechanics computational applications in MEMS, and an example of this is used by the American company ARGOR

Original languageEnglish
Title of host publicationTechnical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
Pages335-338
Number of pages4
StatePublished - 2009
EventNanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009 - Houston, TX, United States
Duration: 3 May 20097 May 2009

Publication series

NameTechnical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
Volume3

Conference

ConferenceNanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
Country/TerritoryUnited States
CityHouston, TX
Period3/05/097/05/09

Keywords

  • Finite Element Method (FEM)
  • Genetic algorithms
  • MEMS
  • Optimization

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