Emission Dependent on composition of Si-rich-SiNX Films obtained by PECVD

J. A. Jaramillo Gomez, T. V. Torchynska, J. L. Casas Espinola, J. A. Bentosa Gutiérrez, L. Khomenkova, A. Slaoui

Research output: Contribution to journal › Conference article › peer-review

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Engineering & Materials Science

Chemistry