TY - JOUR
T1 - Effect of the substrate on the properties of ZnO-MgO thin films grown by atmospheric pressure metal-organic chemical vapor deposition
AU - Torres-Huerta, A. M.
AU - Domínguez-Crespo, M. A.
AU - Brachetti-Sibaja, S. B.
AU - Arenas-Alatorre, J.
AU - Rodríguez-Pulido, A.
N1 - Funding Information:
The authors wish to acknowledge the financial support provided by CONACYT , SIP-IPN 2010-0087 , 2010-0062 and SNI-CONACYT . The authors would like to thank Dr. Eugenio Rodriguez for his technical support.
PY - 2011/7/1
Y1 - 2011/7/1
N2 - The ZnO-MgO alloys possess attractive properties for possible applications in optoelectronic and display devices; however, the optical properties are strongly dependent on the deposition parameters. In this work, the effect of the glassy and metallic substrates on the structural, morphological and optical properties of ZnO-MgO thin films using atmospheric pressure metal-organic chemical vapor deposition was investigated at relatively low deposition temperature, 500 °C. Magnesium and zinc acetylacetonates were used as the metal-organic source. X-ray diffraction experiments provided evidence that the kind of substrates cause a deviation of c-axis lattice constant due to the constitution of a oxide mixture (ZnO and MgO) in combination with different intermetallic compounds(Mg2Zn11 and Mg4Zn 7) in the growth films. The substitutional and interstitial sites of Mg2+ instead of Zn2+ ions in the lattice are the most probable mechanism to form intermetallic compounds. The optical parameters as well as thickness of the films were calculated by Spectroscopic Ellipsometry using the classical dispersion model based on the sum of the single and double Lorentz and Drude oscillators in combination with Kato-Adachi equations, as well as X-ray reflectivity.
AB - The ZnO-MgO alloys possess attractive properties for possible applications in optoelectronic and display devices; however, the optical properties are strongly dependent on the deposition parameters. In this work, the effect of the glassy and metallic substrates on the structural, morphological and optical properties of ZnO-MgO thin films using atmospheric pressure metal-organic chemical vapor deposition was investigated at relatively low deposition temperature, 500 °C. Magnesium and zinc acetylacetonates were used as the metal-organic source. X-ray diffraction experiments provided evidence that the kind of substrates cause a deviation of c-axis lattice constant due to the constitution of a oxide mixture (ZnO and MgO) in combination with different intermetallic compounds(Mg2Zn11 and Mg4Zn 7) in the growth films. The substitutional and interstitial sites of Mg2+ instead of Zn2+ ions in the lattice are the most probable mechanism to form intermetallic compounds. The optical parameters as well as thickness of the films were calculated by Spectroscopic Ellipsometry using the classical dispersion model based on the sum of the single and double Lorentz and Drude oscillators in combination with Kato-Adachi equations, as well as X-ray reflectivity.
KW - Atmospheric pressure metalorganic chemical vapor deposition
KW - Ellipsometry
KW - Magnesium oxide
KW - Optical properties
KW - Surface morphology
KW - Thin films
KW - Zinc oxide
UR - http://www.scopus.com/inward/record.url?scp=79958087243&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2011.03.030
DO - 10.1016/j.tsf.2011.03.030
M3 - Artículo
SN - 0040-6090
VL - 519
SP - 6044
EP - 6052
JO - Thin Solid Films
JF - Thin Solid Films
IS - 18
ER -