Effect of Te doping of InGaAsSb layers on the interface quality of InGaAsSb/GaSb heterojunctions

I. Riech, J. G. Mendoza-Alvarez, M. L. Gomez-Herrera, J. L. Herrera-Perez

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Using the liquid phase epitaxy technique we have grown quaternary p-type Ga0.84In0.16As0.14Sb0.86 layers on n-type GaSb substrates (p-N), as well as n-type layers on p-type substrates (n-P). It has been known that doping with tellurium to obtain n-type InGaAsSb layers, has important effects on the quality of the interface at the heterojunction epitaxial layer/substrate, because of the high diffusion coefficient of the Te atoms. In this work, we have applied the photoacoustic technique to measure the interface recombination velocity in both types of samples: p-N and n-P heterojunctions, and we have compared these results with measurements of atomic force microscopy made along the cross section of the interface substrate-epitaxial layer. Results from both techniques show that there is a better interface quality for the p-N heterojunction as compared to those for the N-p interfaces. The discussion of this behaviour is presented in terms of the behaviour of Te diffusion during the growth of the InGaAsSb epitaxial layers.

Original languageEnglish
Pages (from-to)763-767
Number of pages5
JournalSemiconductor Science and Technology
Volume18
Issue number8
DOIs
StatePublished - Aug 2003
Externally publishedYes

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