Abstract
ZnO:Cu and ZnS thin films were grown by metal-organic chemical vapour deposition (MOCVD) under atmospheric pressure onto glass substrates. The ZnO:Ag films were fabricated from ZnS films by non-vacuum method that consists of simultaneous oxidation and Ag-doping by the close spaced evaporation (CSE) of silver at the temperature of 500-600 °C. Photo-assisted rapid thermal annealing (PARTA) at ambient air during 10-30 s at the temperature of 700-800 °C was used for the ZnO:Cu films. The samples were studied by X-ray diffraction technique (XRD), atomic force microscopy (AFM), and photoluminescence (PL) measurements. The grain size of ZnO:Cu films increased with an increase of Cu concentration. PL spectra of as-deposited ZnO:Cu films depended on Cu concentration and contained the bands typical for the copper. After PARTA at high temperature the emission maximum shifted towards the short-wave region. During the fabrication of ZnO:Ag films the grain growth process was strongly affected by the Ag loading level. The grain size increased with an increase of Ag concentration and ZnO:Ag films with surface roughness of 8 nm were obtained. Observed 385 nm PL peak for these samples can be attributed to the exciton-exciton emission that proves the high quality of the obtained ZnO:Ag films.
Translated title of the contribution | Efecto del dopaje en las propiedades de películas delgadas de Zno:Cu y Zno:Ag |
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Original language | English |
Pages (from-to) | 1115-1118 |
Number of pages | 4 |
Journal | Journal of Materials Science: Materials in Electronics |
Volume | 18 |
Issue number | 11 |
DOIs | |
State | Published - Nov 2007 |