Drying induced self-formation of semi-ordered nano-porous silicon micro-hairs

Valery A. Skryshevsky, Ganna Vorobey, Cecile Jamois, Jacobo Munguia, Vladimir Lysenko

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Spontaneous drying induced self-transformation of highly-porous Si layers into oriented micro-tubular hairs is reported. Main mechanisms involved in such a self-formation of the porous silicon hairs are analyzed: the large capillary stresses at the liquid evaporation from the pores during the drying process, existence of lateral in-plane stresses at the interface "PS layer - bulk Si substrate", engineering of in-depth mechanical stress gradient and preferential cracking of the porous layer along the [110] and [1$ \bar 1 $0] directions.

Original languageEnglish
Pages (from-to)1805-1807
Number of pages3
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume8
Issue number6
DOIs
StatePublished - Jun 2011
Externally publishedYes

Keywords

  • Drying
  • Films
  • Microtubes
  • Nano-porous si

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