Abstract
Spontaneous drying induced self-transformation of highly-porous Si layers into oriented micro-tubular hairs is reported. Main mechanisms involved in such a self-formation of the porous silicon hairs are analyzed: the large capillary stresses at the liquid evaporation from the pores during the drying process, existence of lateral in-plane stresses at the interface "PS layer - bulk Si substrate", engineering of in-depth mechanical stress gradient and preferential cracking of the porous layer along the [110] and [1$ \bar 1 $0] directions.
Original language | English |
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Pages (from-to) | 1805-1807 |
Number of pages | 3 |
Journal | Physica Status Solidi (C) Current Topics in Solid State Physics |
Volume | 8 |
Issue number | 6 |
DOIs | |
State | Published - Jun 2011 |
Externally published | Yes |
Keywords
- Drying
- Films
- Microtubes
- Nano-porous si