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Design and simulation of polysilicon micro tuning fork for ultrasonic frequency operation
G. Quiroz-Merino, R. Sanchez-Fraga, H. Baez-Medina, V. H. Ponce-Ponce, S. Mendoza-Acevedo
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1
Scopus
citations