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Deposit of AlN thin films by nitrogen reactive pulsed laser ablation using an Al target
F. Chale-Lara, M. Zapata-Torres, F. Caballero-Briones, W. De la Cruz, N. Cruz González, C. Huerta-Escamilla, M. H. Farías
Research output: Contribution to journal › Article › peer-review
4
Scopus
citations