TY - JOUR
T1 - CVD growth of carbon nanotubes on catalyst patterns generated with AFM lithography
AU - Ortega-Cervantez, G.
AU - Rueda-Morales, G.
AU - Ortiz-Lopez, J.
N1 - Funding Information:
Acknowledgments G.R.M. and J.O.L. are grateful to COFAA-IPN for a SIBE fellowship. J.O.L. is also grateful to SIP-IPN for partial financial support through projects 20040487 y 20050408.
PY - 2007/11
Y1 - 2007/11
N2 - We obtain carbon nanotubes (CNTs) by chemical vapor deposition (CVD) using ethanol as carbon source. CNTs are grown on linear and rectangular patterns containing Co-Mo catalysts. These patterns were generated with a combination of dip-pen and 'scratching' lithography performed with Atomic Force Microscopy (AFM). In this procedure, a gold thin film deposited on porous alumina substrates is first scratched and subsequently a solution of Co and Mo acetates in ethanol is painted on the scratched area with a syringe mounted on the AFM instrument. CVD growth temperature of CNTs is of about 750°C with an ethanol exposure time of 30 min. In the linear patterns a dense film of CNTs is obtained with average lengths of 1 μm and in the rectangular patterns CNTs grow with diameters of about 50 nm. Sample analysis is performed with scanning electron microscopy (SEM) and AFM.
AB - We obtain carbon nanotubes (CNTs) by chemical vapor deposition (CVD) using ethanol as carbon source. CNTs are grown on linear and rectangular patterns containing Co-Mo catalysts. These patterns were generated with a combination of dip-pen and 'scratching' lithography performed with Atomic Force Microscopy (AFM). In this procedure, a gold thin film deposited on porous alumina substrates is first scratched and subsequently a solution of Co and Mo acetates in ethanol is painted on the scratched area with a syringe mounted on the AFM instrument. CVD growth temperature of CNTs is of about 750°C with an ethanol exposure time of 30 min. In the linear patterns a dense film of CNTs is obtained with average lengths of 1 μm and in the rectangular patterns CNTs grow with diameters of about 50 nm. Sample analysis is performed with scanning electron microscopy (SEM) and AFM.
UR - http://www.scopus.com/inward/record.url?scp=34548155753&partnerID=8YFLogxK
U2 - 10.1007/s10854-007-9140-9
DO - 10.1007/s10854-007-9140-9
M3 - Artículo
AN - SCOPUS:34548155753
SN - 0957-4522
VL - 18
SP - 1163
EP - 1166
JO - Journal of Materials Science: Materials in Electronics
JF - Journal of Materials Science: Materials in Electronics
IS - 11
ER -